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Microsystem Technologies
Erschienen in: Microsystem Technologies 2/2015

01.02.2015 | Technical Paper

Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles

verfasst von: Huawei Li, Yiqiang Fan, David Conchouso, Ian G. Foulds

Erschienen in: Microsystem Technologies | Ausgabe 2/2015

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Abstract

This paper reports a novel method to fabricate three-dimensional (3D) polydimethylsiloxane (PDMS) micro-pillars using a CO2 laser-machined poly(methyl methacrylate) (PMMA) mold with through-holes. This method eliminates the requirements of expensive and complicated facilities to fabricate a 3D mold. The micro-pillars were formed by the capillary force that draws PDMS into the through-holes of the PMMA mold. The tilt angles of the micro-pillars depend on the tilt angles of the through-holes in the mold, and the concave and convex micro-lens tip shapes of the PDMS micro-pillars can be modified by changing the surface wettability of the PMMA through-holes.
Vorheriger Artikel Automatic real-time offset calibration of gyroscopes
Nächster Artikel Application of Aerosol Jet technology in through-via interconnection for MEMS wafer-level packaging

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Metadaten
Titel
Surface tension-induced PDMS micro-pillars with controllable tips and tilt angles
verfasst von
Huawei Li
Yiqiang Fan
David Conchouso
Ian G. Foulds
Publikationsdatum
01.02.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 2/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-013-2031-5

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