2014 | OriginalPaper | Buchkapitel
Synthesis of Multilayer Graphene by Filtered Cathodic Vacuum Arc Technique
verfasst von : O. S. Panwar, Ajay Kesarwani, Atul Bisht, Sreekumar Chockalingam, S. R. Dhakate, B. P. Singh, R. K. Rakshit
Erschienen in: Physics of Semiconductor Devices
Verlag: Springer International Publishing
Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.
Wählen Sie Textabschnitte aus um mit Künstlicher Intelligenz passenden Patente zu finden. powered by
Markieren Sie Textabschnitte, um KI-gestützt weitere passende Inhalte zu finden. powered by
Filtered cathodic vacuum arc technique has been used to deposit amorphous carbon films of varying thickness on catalytic nickel thin film grown on SiO
2
/Si substrates. Subsequently these a-C films were annealed in vacuum at 650 °C. Raman spectroscopy together with optical microscopy and scanning electron microscopy has revealed multilayer graphene formation.