1984 | OriginalPaper | Buchkapitel
The Contribution of SIMS to the Characterization of III-V Compounds
verfasst von : A. M. Huber, G. Morillot, A. Friederich
Erschienen in: Secondary Ion Mass Spectrometry SIMS IV
Verlag: Springer Berlin Heidelberg
Enthalten in: Professional Book Archive
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For several years, secondary ion mass spectrometry (SIMS) has been very successfully applied in the electronics industry to the characterization of semiconductor materials. It contributes in particular to the improvement of the III-V materials used in the new electronics industry for microwave and opto-electronic devices. A number of interesting published works provide evidence for this.