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Erschienen in:
1996 | OriginalPaper | Buchkapitel
The Response of an Air-Coupled Ultrasonic Transducer for Various Backplates and Apertures
verfasst von : A. G. Bashford, D. A. Hutchins, D. W. Schindel
Erschienen in: Review of Progress in Quantitative Nondestructive Evaluation
Verlag: Springer US
Enthalten in: Professional Book Archive
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Development of air-coupled capacitance ultrasonic transducers that operate above 100kHz have recently been of interest. The main applications for these devices include the location and imaging of objects, and in the nondestructive evaluation of engineering materials. To control the response of either as a source or a receiver, we needed to investigate the effect of using different backplate materials and manufacturing techniques. Backplates were produced in a range of materials such as silicon, copper and stainless steel. Various techniques of micromachining such as chemical etching, laser machining and ion beam machining were used.