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2018 | OriginalPaper | Buchkapitel

8. Ver- und Entsorgung von Reinstmedien

verfasst von : Andreas Neuber

Erschienen in: Reinraumtechnik

Verlag: Springer Berlin Heidelberg

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Zusammenfassung

Die Reinstmedientechnik als Teilgebiet der Reinraumtechnik und der Prozessver- und -entsorgungstechnik beschäftigt sich mit der Ver- und Entsorgung von Prozessgeräten mit Prozessmedien hoher und höchster Reinheit, einschließlich des Recyclings und anderweitiger Wiedernutzbarmachung von Ressourcen.

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Metadaten
Titel
Ver- und Entsorgung von Reinstmedien
verfasst von
Andreas Neuber
Copyright-Jahr
2018
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-662-54915-5_8

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