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Erschienen in: Microsystem Technologies 8/2019

03.12.2018 | Technical Paper

Vibration characterisation of AFG microcantilevers in nonlinear regime

verfasst von: Mergen H. Ghayesh

Erschienen in: Microsystem Technologies | Ausgabe 8/2019

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Abstract

The large-amplitude vibrations of axially functionally graded (AFG) microcantilevers is investigated for the first time. Due to a harmonic base-displacement, the AFG microcantilever undergoes large time-varying deformations; the small-size influences are incorporated using the modified couple stress theory (MCST) and the large-amplitude vibrations is moderated. Exponential distributions along the length are considered for material properties. Hamilton’s work/energy principle is used to balance the energies of the oscillating AFG microcantilever. The harmonic base-displacement is included via a relative motion rule. A truncation is conducted and a large-dimensional multi DOF system is obtained for an AFG microcantilever under inextensibility. A continuation method is utilised and frequency and base-displacement diagrams are obtained for different material gradient indices and the spatial variation of the material properties.

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Literatur
Zurück zum Zitat Akgöz B, Civalek Ö (2013) Free vibration analysis of axially functionally graded tapered Bernoulli–Euler microbeams based on the modified couple stress theory. Compos Struct 98:314–322CrossRef Akgöz B, Civalek Ö (2013) Free vibration analysis of axially functionally graded tapered Bernoulli–Euler microbeams based on the modified couple stress theory. Compos Struct 98:314–322CrossRef
Zurück zum Zitat Chorsi MT, Chorsi HT (2017) Modeling and analysis of MEMS disk resonators. Microsyst Technol 24(6):2517–2528CrossRef Chorsi MT, Chorsi HT (2017) Modeling and analysis of MEMS disk resonators. Microsyst Technol 24(6):2517–2528CrossRef
Zurück zum Zitat Dai H, Wang Y, Wang L (2015) Nonlinear dynamics of cantilevered microbeams based on modified couple stress theory. Int J Eng Sci 94:103–112MathSciNetCrossRefMATH Dai H, Wang Y, Wang L (2015) Nonlinear dynamics of cantilevered microbeams based on modified couple stress theory. Int J Eng Sci 94:103–112MathSciNetCrossRefMATH
Zurück zum Zitat Farokhi H, Ghayesh MH (2015a) Thermo-mechanical dynamics of perfect and imperfect Timoshenko microbeams. Int J Eng Sci 91:12–33MathSciNetCrossRefMATH Farokhi H, Ghayesh MH (2015a) Thermo-mechanical dynamics of perfect and imperfect Timoshenko microbeams. Int J Eng Sci 91:12–33MathSciNetCrossRefMATH
Zurück zum Zitat Farokhi H, Ghayesh MH (2015b) Nonlinear dynamical behaviour of geometrically imperfect microplates based on modified couple stress theory. Int J Mech Sci 90:133–144CrossRef Farokhi H, Ghayesh MH (2015b) Nonlinear dynamical behaviour of geometrically imperfect microplates based on modified couple stress theory. Int J Mech Sci 90:133–144CrossRef
Zurück zum Zitat Farokhi H, Ghayesh MH (2018a) Supercritical nonlinear parametric dynamics of Timoshenko microbeams. Commun Nonlinear Sci Numer Simul 59:592–605MathSciNetCrossRef Farokhi H, Ghayesh MH (2018a) Supercritical nonlinear parametric dynamics of Timoshenko microbeams. Commun Nonlinear Sci Numer Simul 59:592–605MathSciNetCrossRef
Zurück zum Zitat Farokhi H, Ghayesh MH, Amabili M (2013) Nonlinear dynamics of a geometrically imperfect microbeam based on the modified couple stress theory. Int J Eng Sci 68:11–23MathSciNetCrossRefMATH Farokhi H, Ghayesh MH, Amabili M (2013) Nonlinear dynamics of a geometrically imperfect microbeam based on the modified couple stress theory. Int J Eng Sci 68:11–23MathSciNetCrossRefMATH
Zurück zum Zitat Farokhi H, Ghayesh MH, Hussain S (2016) Large-amplitude dynamical behaviour of microcantilevers. Int J Eng Sci 106:29–41CrossRefMATH Farokhi H, Ghayesh MH, Hussain S (2016) Large-amplitude dynamical behaviour of microcantilevers. Int J Eng Sci 106:29–41CrossRefMATH
Zurück zum Zitat Farokhi H, Ghayesh MH, Gholipour A, Hussain Sh (2017b) Motion characteristics of bilayered extensible Timoshenko microbeams. Int J Eng Sci 112:1–17MathSciNetCrossRefMATH Farokhi H, Ghayesh MH, Gholipour A, Hussain Sh (2017b) Motion characteristics of bilayered extensible Timoshenko microbeams. Int J Eng Sci 112:1–17MathSciNetCrossRefMATH
Zurück zum Zitat Gaafar E, Zarog M (2017) A low-stress and low temperature gradient microgripper for biomedical applications. Microsyst Technol 23:5415–5422CrossRef Gaafar E, Zarog M (2017) A low-stress and low temperature gradient microgripper for biomedical applications. Microsyst Technol 23:5415–5422CrossRef
Zurück zum Zitat Ghayesh MH (2009) Stability characteristics of an axially accelerating string supported by an elastic foundation. Mech Mach Theory 44:1964–1979CrossRefMATH Ghayesh MH (2009) Stability characteristics of an axially accelerating string supported by an elastic foundation. Mech Mach Theory 44:1964–1979CrossRefMATH
Zurück zum Zitat Ghayesh MH (2011) On the natural frequencies, complex mode functions, and critical speeds of axially traveling laminated beams: parametric study. Acta Mechanica Solida Sinica 24(4):373–382CrossRef Ghayesh MH (2011) On the natural frequencies, complex mode functions, and critical speeds of axially traveling laminated beams: parametric study. Acta Mechanica Solida Sinica 24(4):373–382CrossRef
Zurück zum Zitat Ghayesh MH (2018a) Functionally graded microbeams: simultaneous presence of imperfection and viscoelasticity. Int J Mech Sci 140:339–350CrossRef Ghayesh MH (2018a) Functionally graded microbeams: simultaneous presence of imperfection and viscoelasticity. Int J Mech Sci 140:339–350CrossRef
Zurück zum Zitat Ghayesh MH (2018b) Nonlinear vibration analysis of axially functionally graded shear-deformable tapered beams. Appl Math Model 59:583–596MathSciNetCrossRef Ghayesh MH (2018b) Nonlinear vibration analysis of axially functionally graded shear-deformable tapered beams. Appl Math Model 59:583–596MathSciNetCrossRef
Zurück zum Zitat Ghayesh MH, Amabili M (2012) Nonlinear dynamics of axially moving viscoelastic beams over the buckled state. Comput Struct 112–113:406–421CrossRef Ghayesh MH, Amabili M (2012) Nonlinear dynamics of axially moving viscoelastic beams over the buckled state. Comput Struct 112–113:406–421CrossRef
Zurück zum Zitat Ghayesh MH, Amabili M (2014) Coupled longitudinal-transverse behaviour of a geometrically imperfect microbeam. Compos Part B Eng 60:371–377CrossRef Ghayesh MH, Amabili M (2014) Coupled longitudinal-transverse behaviour of a geometrically imperfect microbeam. Compos Part B Eng 60:371–377CrossRef
Zurück zum Zitat Ghayesh MH, Amabili M, Paidoussis MP (2012) Nonlinear vibrations and stability of an axially moving beam with an intermediate spring support: two-dimensional analysis. Nonlinear Dyn 70(1):335–354MathSciNetCrossRef Ghayesh MH, Amabili M, Paidoussis MP (2012) Nonlinear vibrations and stability of an axially moving beam with an intermediate spring support: two-dimensional analysis. Nonlinear Dyn 70(1):335–354MathSciNetCrossRef
Zurück zum Zitat Ghayesh MH, Amabili M, Farokhi H (2013a) Three-dimensional nonlinear size-dependent behaviour of Timoshenko microbeams. Int J Eng Sci 71:1–14MathSciNetCrossRefMATH Ghayesh MH, Amabili M, Farokhi H (2013a) Three-dimensional nonlinear size-dependent behaviour of Timoshenko microbeams. Int J Eng Sci 71:1–14MathSciNetCrossRefMATH
Zurück zum Zitat Ghayesh MH, Farokhi H, Amabili M (2013b) Nonlinear dynamics of a microscale beam based on the modified couple stress theory. Compos Part B Eng 50:318–324CrossRefMATH Ghayesh MH, Farokhi H, Amabili M (2013b) Nonlinear dynamics of a microscale beam based on the modified couple stress theory. Compos Part B Eng 50:318–324CrossRefMATH
Zurück zum Zitat Ghayesh MH, Farokhi H, Amabili M (2013c) Nonlinear behaviour of electrically actuated MEMS resonators. Int J Eng Sci 71:137–155CrossRefMATH Ghayesh MH, Farokhi H, Amabili M (2013c) Nonlinear behaviour of electrically actuated MEMS resonators. Int J Eng Sci 71:137–155CrossRefMATH
Zurück zum Zitat Ghayesh MH, Amabili M, Farokhi H (2013d) Nonlinear forced vibrations of a microbeam based on the strain gradient elasticity theory. Int J Eng Sci 63:52–60MathSciNetCrossRefMATH Ghayesh MH, Amabili M, Farokhi H (2013d) Nonlinear forced vibrations of a microbeam based on the strain gradient elasticity theory. Int J Eng Sci 63:52–60MathSciNetCrossRefMATH
Zurück zum Zitat Ghayesh MH, Paidoussis MP, Amabili M (2013e) Nonlinear dynamics of cantilevered extensible pipes conveying fluid. J Sound Vib 332:6405–6418CrossRef Ghayesh MH, Paidoussis MP, Amabili M (2013e) Nonlinear dynamics of cantilevered extensible pipes conveying fluid. J Sound Vib 332:6405–6418CrossRef
Zurück zum Zitat Ghayesh MH, Farokhi H, Amabili M (2014) In-plane and out-of-plane motion characteristics of microbeams with modal interactions. Compos Part B Eng 60:423–439CrossRef Ghayesh MH, Farokhi H, Amabili M (2014) In-plane and out-of-plane motion characteristics of microbeams with modal interactions. Compos Part B Eng 60:423–439CrossRef
Zurück zum Zitat Ghayesh MH, Farokhi H, Hussain Sh (2016b) Viscoelastically coupled size-dependent dynamics of microbeams. Int J Eng Sci 109:243–255MathSciNetCrossRefMATH Ghayesh MH, Farokhi H, Hussain Sh (2016b) Viscoelastically coupled size-dependent dynamics of microbeams. Int J Eng Sci 109:243–255MathSciNetCrossRefMATH
Zurück zum Zitat Ghayesh MH, Farokhi H, Gholipour A (2017b) Vibration analysis of geometrically imperfect three-layered shear-deformable microbeams. Int J Mech Sci 122:370–383CrossRef Ghayesh MH, Farokhi H, Gholipour A (2017b) Vibration analysis of geometrically imperfect three-layered shear-deformable microbeams. Int J Mech Sci 122:370–383CrossRef
Zurück zum Zitat Ghayesh MH, Farokhi H, Gholipour A, Tavallaeinejad M (2018) Nonlinear oscillations of functionally graded microplates. Int J Eng Sci 122:56–72CrossRefMATH Ghayesh MH, Farokhi H, Gholipour A, Tavallaeinejad M (2018) Nonlinear oscillations of functionally graded microplates. Int J Eng Sci 122:56–72CrossRefMATH
Zurück zum Zitat Gholipour A, Farokhi H, Ghayesh MH (2015) In-plane and out-of-plane nonlinear size-dependent dynamics of microplates. Nonlinear Dyn 79:1771–1785CrossRef Gholipour A, Farokhi H, Ghayesh MH (2015) In-plane and out-of-plane nonlinear size-dependent dynamics of microplates. Nonlinear Dyn 79:1771–1785CrossRef
Zurück zum Zitat Hamzah MH, Karim J, Ralib AAM et al (2017) Design and analysis of a boosted pierce oscillator using MEMS SAW resonators. Microsyst Technol 24(1):587–594CrossRef Hamzah MH, Karim J, Ralib AAM et al (2017) Design and analysis of a boosted pierce oscillator using MEMS SAW resonators. Microsyst Technol 24(1):587–594CrossRef
Zurück zum Zitat Hari K, Verma SK, Praveen Krishna IR et al (2017) Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity. Microsyst Technol 24(5):2437–2444CrossRef Hari K, Verma SK, Praveen Krishna IR et al (2017) Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity. Microsyst Technol 24(5):2437–2444CrossRef
Zurück zum Zitat Hein H, Feklistova L (2011) Free vibrations of non-uniform and axially functionally graded beams using Haar wavelets. Eng Struct 33:3696–3701CrossRef Hein H, Feklistova L (2011) Free vibrations of non-uniform and axially functionally graded beams using Haar wavelets. Eng Struct 33:3696–3701CrossRef
Zurück zum Zitat Huang Y, Zhang M, Rong H (2016) Buckling analysis of axially functionally graded and non-uniform beams based on Timoshenko theory. Acta Mech Solid Sin 29:200–207CrossRef Huang Y, Zhang M, Rong H (2016) Buckling analysis of axially functionally graded and non-uniform beams based on Timoshenko theory. Acta Mech Solid Sin 29:200–207CrossRef
Zurück zum Zitat Kahya V, Turan M (2017) Finite element model for vibration and buckling of functionally graded beams based on the first-order shear deformation theory. Compos B Eng 109:108–115CrossRef Kahya V, Turan M (2017) Finite element model for vibration and buckling of functionally graded beams based on the first-order shear deformation theory. Compos B Eng 109:108–115CrossRef
Zurück zum Zitat Kim N-I, Lee J (2017) Coupled vibration characteristics of shear flexible thin-walled functionally graded sandwich I-beams. Compos B Eng 110:229–247CrossRef Kim N-I, Lee J (2017) Coupled vibration characteristics of shear flexible thin-walled functionally graded sandwich I-beams. Compos B Eng 110:229–247CrossRef
Zurück zum Zitat Li C, Cordovilla F, Ocaña JL (2017) The design and analysis of a novel structural piezoresistive pressure sensor for low pressure measurement. Microsyst Technol 23:5677–5687CrossRef Li C, Cordovilla F, Ocaña JL (2017) The design and analysis of a novel structural piezoresistive pressure sensor for low pressure measurement. Microsyst Technol 23:5677–5687CrossRef
Zurück zum Zitat Liu F, Gao S, Niu S et al (2017) Optimal design of high-g MEMS piezoresistive accelerometer based on Timoshenko beam theory. Microsyst Technol 1–13 Liu F, Gao S, Niu S et al (2017) Optimal design of high-g MEMS piezoresistive accelerometer based on Timoshenko beam theory. Microsyst Technol 1–13
Zurück zum Zitat Lotfi M, Moghimi Zand M, Isaac Hosseini I et al (2017) Transient behavior and dynamic pull-in instability of electrostatically-actuated fluid-conveying microbeams. Microsyst Technol 23:6015–6023CrossRef Lotfi M, Moghimi Zand M, Isaac Hosseini I et al (2017) Transient behavior and dynamic pull-in instability of electrostatically-actuated fluid-conveying microbeams. Microsyst Technol 23:6015–6023CrossRef
Zurück zum Zitat Ma LY, Nordin AN, Soin N (2017) A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch. Microsyst Technol 24(1):561–574CrossRef Ma LY, Nordin AN, Soin N (2017) A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch. Microsyst Technol 24(1):561–574CrossRef
Zurück zum Zitat Maalawi KY (2017) Dynamic optimization of functionally graded thin-walled box beams. Int J Struct Stabil Dyn 17(09):1750109MathSciNetCrossRef Maalawi KY (2017) Dynamic optimization of functionally graded thin-walled box beams. Int J Struct Stabil Dyn 17(09):1750109MathSciNetCrossRef
Zurück zum Zitat Menon PK, Nayak J, Pratap R (2017) Sensitivity analysis of an in-plane MEMS vibratory gyroscope. Microsyst Technol 24(5):2199–2213CrossRef Menon PK, Nayak J, Pratap R (2017) Sensitivity analysis of an in-plane MEMS vibratory gyroscope. Microsyst Technol 24(5):2199–2213CrossRef
Zurück zum Zitat Nikolić A (2017) Free vibration analysis of a non-uniform axially functionally graded cantilever beam with a tip body. Arch Appl Mech 87:1227–1241CrossRef Nikolić A (2017) Free vibration analysis of a non-uniform axially functionally graded cantilever beam with a tip body. Arch Appl Mech 87:1227–1241CrossRef
Zurück zum Zitat Ouakad HM (2017) Comprehensive numerical modeling of the nonlinear structural behavior of MEMS/NEMS electrostatic actuators under the effect of the van der Waals forces. Microsyst Technol 23:5903–5910CrossRef Ouakad HM (2017) Comprehensive numerical modeling of the nonlinear structural behavior of MEMS/NEMS electrostatic actuators under the effect of the van der Waals forces. Microsyst Technol 23:5903–5910CrossRef
Zurück zum Zitat Rokni H, Milani AS, Seethaler RJ (2015) Size-dependent vibration behavior of functionally graded CNT-reinforced polymer microcantilevers: modeling and optimization. Eur J Mech A/Solids 49:26–34MathSciNetCrossRefMATH Rokni H, Milani AS, Seethaler RJ (2015) Size-dependent vibration behavior of functionally graded CNT-reinforced polymer microcantilevers: modeling and optimization. Eur J Mech A/Solids 49:26–34MathSciNetCrossRefMATH
Zurück zum Zitat Samaali H, Najar F (2017) Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage. Microsyst Technol 23:5317–5327CrossRef Samaali H, Najar F (2017) Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage. Microsyst Technol 23:5317–5327CrossRef
Zurück zum Zitat Sari M, Shaat M, Abdelkefi A (2017) Frequency and mode veering phenomena of axially functionally graded non-uniform beams with nonlocal residuals. Compos Struct 163:280–292CrossRef Sari M, Shaat M, Abdelkefi A (2017) Frequency and mode veering phenomena of axially functionally graded non-uniform beams with nonlocal residuals. Compos Struct 163:280–292CrossRef
Zurück zum Zitat Saxena S, Sharma R, Pant BD (2017) Dynamic characterization of fabricated guided two beam and four beam cantilever type MEMS based piezoelectric energy harvester having pyramidal shape seismic mass. Microsyst Technol 23:5947–5958CrossRef Saxena S, Sharma R, Pant BD (2017) Dynamic characterization of fabricated guided two beam and four beam cantilever type MEMS based piezoelectric energy harvester having pyramidal shape seismic mass. Microsyst Technol 23:5947–5958CrossRef
Zurück zum Zitat Shahba A, Attarnejad R, Hajilar S (2011) Free vibration and stability of axially functionally graded tapered Euler–Bernoulli beams. Shock Vib 18:683–696CrossRef Shahba A, Attarnejad R, Hajilar S (2011) Free vibration and stability of axially functionally graded tapered Euler–Bernoulli beams. Shock Vib 18:683–696CrossRef
Zurück zum Zitat Shi H, Fan S, Zhang Y (2017) Design and optimization of slit-resonant beam in a MEMS pressure sensor based on uncertainty analysis. Microsyst Technol 23:5545–5559CrossRef Shi H, Fan S, Zhang Y (2017) Design and optimization of slit-resonant beam in a MEMS pressure sensor based on uncertainty analysis. Microsyst Technol 23:5545–5559CrossRef
Zurück zum Zitat Şimşek M (2015) Size dependent nonlinear free vibration of an axially functionally graded (AFG) microbeam using He’s variational method. Compos Struct 131:207–214CrossRef Şimşek M (2015) Size dependent nonlinear free vibration of an axially functionally graded (AFG) microbeam using He’s variational method. Compos Struct 131:207–214CrossRef
Zurück zum Zitat Taati E (2016) Analytical solutions for the size dependent buckling and postbuckling behavior of functionally graded micro-plates. Int J Eng Sci 100:45–60MathSciNetCrossRefMATH Taati E (2016) Analytical solutions for the size dependent buckling and postbuckling behavior of functionally graded micro-plates. Int J Eng Sci 100:45–60MathSciNetCrossRefMATH
Zurück zum Zitat Wang L, Zhang W, Liu YA et al (2017) Impact analysis of convected motion on the carrier frequency of a carrier-driven gyroscope signal. Microsyst Technol 23:5805–5813CrossRef Wang L, Zhang W, Liu YA et al (2017) Impact analysis of convected motion on the carrier frequency of a carrier-driven gyroscope signal. Microsyst Technol 23:5805–5813CrossRef
Metadaten
Titel
Vibration characterisation of AFG microcantilevers in nonlinear regime
verfasst von
Mergen H. Ghayesh
Publikationsdatum
03.12.2018
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 8/2019
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-4181-y

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