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Erschienen in: Optical and Quantum Electronics 3/2015

01.03.2015

Wavefront phase reconstruction approach of imaging interferometry based on shearography and the integrated unwrapping algorithm

verfasst von: Li Mingxing, Yang Kai, Zhong Liyun

Erschienen in: Optical and Quantum Electronics | Ausgabe 3/2015

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Abstract

Imaging interferometry is a method used for high-precision inspection. It has a widespread application value in the semiconductor film detection and interferometric synthetic aperture radar. During the imaging interferometry process, the interferometric phase image, as the result of imaging process, can be low-quality because of under-sampling effect, mixed noise, etc. Thus, research groups around the world focus on optimal unwrapping methods as a way to reduce the harmful effect caused by under-sampling effect and mixed noise. By just one interferometric phase image, the result for this wavefront reconstruction method can be obtained. We present a optimal process based on shearography and the integrated unwrapping algorithm with a better accuracy parameter for the unwrapping phase formula. By just one interferometric phase image, the result for this wavefront reconstruction method can be obtained. At last, by verifying the simulation results and experiment data from different perspectives, the ability to improve data accuracy is described.

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Metadaten
Titel
Wavefront phase reconstruction approach of imaging interferometry based on shearography and the integrated unwrapping algorithm
verfasst von
Li Mingxing
Yang Kai
Zhong Liyun
Publikationsdatum
01.03.2015
Verlag
Springer US
Erschienen in
Optical and Quantum Electronics / Ausgabe 3/2015
Print ISSN: 0306-8919
Elektronische ISSN: 1572-817X
DOI
https://doi.org/10.1007/s11082-014-9931-1

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