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Erschienen in:
1981 | OriginalPaper | Buchkapitel
X-Ray Spectral Measurement: WDS and EDS
verfasst von : Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles Fiori, Eric Lifshin
Erschienen in: Scanning Electron Microscopy and X-Ray Microanalysis
Verlag: Springer US
Enthalten in: Professional Book Archive
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Chemical analysis in the scanning electron microscope and electron microprobe is performed by measuring the energy and intensity distribution of the x-ray signal generated by a focused electron beam. The subject of x-ray production has already been introduced in the chapter on electronbeam-specimen interactions (Chapter 3), which describes the mechanisms for both characteristic and continuum x-ray production. This chapter is concerned with the methods for detecting and measuring these signals as well as converting them into a useful form for qualitative and quantitative analysis.