Micromechanical RF filters excited by the Lorentz force

Published under licence by IOP Publishing Ltd
, , Citation Dennis S Greywall 1999 J. Micromech. Microeng. 9 78 DOI 10.1088/0960-1317/9/1/310

Download Article PDF

Article metrics

206 Total downloads

Share this article

Author affiliations

1 Bell Laboratories, Lucent Technologies Inc., Murray Hill, NJ 07974, USA

Dates

  1. Received 23 September 1998

Buy this article in print

Journal RSS
Sign up for new issue notifications
0960-1317/9/1/78

Abstract

A design is proposed for a high-Q rf band-pass filter whose active element is a micromachined mechanical resonator. The device is located in a large magnetic field created by a miniature permanent magnet and can be configured to operate at frequencies extending into the low GHz regime.

Export citation and abstract BibTeX RIS

Previous article in issue
Next article in issue
Please wait… references are loading.
10.1088/0960-1317/9/1/310