Wear Reduction Method for Frictionally Fast Feeding Piezoactuator

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Published 8 February 2006 • Copyright (c) 2006 The Japan Society of Applied Physics
, , Citation Kouji Kosaka et al 2006 Jpn. J. Appl. Phys. 45 1005 DOI 10.1143/JJAP.45.1005

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1 Tech-concierge Kumamoto Incorporated, 2020-3 Tabaru Mashiki, Kamimashiki-gun, Kumamoto 861-2202, Japan

2 Graduate School of Science and Technology, Kumamoto University, 2-39-1 Kurokami, Kumamoto 860-8555, Japan

3 Zygc K.K., Ueno Sanwa Bldg., 1-14-4 Higashiueno, Taito-ku, Tokyo 110-0015, Japan

4 Faculty of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan

5 College of Science and Engineering, Aoyama Gakuin University, 5-10-1 Fuchinobe, Sagamihara, Kanagawa 229-8558, Japan

6 New Industry Creation Hatchery Center, Tohoku University, 6-6-10 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Dates

  1. Received 1 May 2005
  2. Accepted 26 October 2005
  3. Published

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Abstract

A new wear reduction method, which is based on a static friction without slipping, is developed for a frictionally fast feeding piezoactuator. This method is required for overcoming the problems related to the scattering of particles due to the use of a contact type actuator. Furthermore, wear reduction result in a frictionally driving actuator with a long-term stability for various applications, such as the electron beam inspection in the next-generation semiconductor industry.

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10.1143/JJAP.45.1005