Abstract
Several phases in the Bi‐O system have been deposited by chemical vapor deposition on MgO(001) substrates Bismuth iodide, 
, and oxygen were used as source materials. An experimental chemical vapor deposition stability diagram has been determined as a function of the deposition temperature and the 
ratio. Depending on these parameters different phases such as a 
, 
, and 
were deposited. At low deposition temperatures bismuth oxyiodides (BiOI or 
) were also obtained. For suitable conditions the BiOI phase was found to grow epitaxially on the MgO(001) substrate with the two different orientations 
and 
.