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Pattern Recognition and Image Analysis

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01-01-2021 | PATTERN RECOGNITION AND IMAGE ANALYSIS MILIEU

Analysis of Digital Images in Order to Control the Manufacturing of Integrated Circuits

Authors: A. A. Doudkin, A. V. Inyutin

Published in: Pattern Recognition and Image Analysis | Issue 1/2021

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Abstract

This paper offers a brief overview of the main theoretical and practical results in digital image processing in the manufacturing of integrated circuits (ICs), obtained by the authors and staff of the Laboratory for Systems Identification of the United Institute for Informatics Problems of the National Academy of Sciences of Belarus. The developed methods, algorithms, and computer analysis technology combine conventional digital processing methods and neural networks. This ensures robust recognition and optical inspection of the objects of layouts of ICs with the desired accuracy. The obtained results are used at the leading enterprises of electronic engineering of the Republic of Belarus in VLSI designing and manufacturing, as well as in the fabrication of optical inspection units for VLSI semiconductor wafers.

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Title: Analysis of Digital Images in Order to Control the Manufacturing of Integrated Circuits
Authors: A. A. Doudkin
A. V. Inyutin
Publication date: 01-01-2021
Publisher: Pleiades Publishing
Published in: Pattern Recognition and Image Analysis / Issue 1/2021
Print ISSN: 1054-6618
Electronic ISSN: 1555-6212
DOI: https://doi.org/10.1134/S1054661821010077

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