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Measurement Techniques
Published in: Measurement Techniques 3/2016

14-07-2016

Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images

Authors: A. Yu. Kuzin, A. L. Vasil’ev, V. B. Mityukhlyaev, A. A. Mikhutkin, P. A. Todua, M. N. Filippov

Published in: Measurement Techniques | Issue 3/2016

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Abstract

We present analysis results of factors influencing the systematic error in 3-D reconstruction of surface reliefs based on stereo images obtained using the scanning electron microscope S-4800. The typical size for the surface relief elements is less than 1 μm. The main sources of the error are found. It is shown that for typical samples the main factor influencing the systematic error of 3-D reconstruction is the parallax measurement error.
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Literature
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J. Goldstein, D. Newbury, and D. Joy, Scanning Electron Microscopy and x-Ray Microanalysis, Kluwer Academic, Plenum Publishers, New York (2003), 3rd ed.CrossRef
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F. Marinello, P. Bariani, E. Savio, et al., “Critical factors in SEM 3D stereo microscopy.” Meas. Sci. Technol., 19, No. 6, 065705-1–12 (2008).ADSCrossRef
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L. Carli, G. Genta, A. Cantatore, et al., “Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique,” Meas. Sci. Technol., 22, No. 3, 035103-1–11 (2011).ADSCrossRef
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P. Bariani, L. De Chiffre, H. N. Hansen, and A. Horsewell, “Investigation on the traceability of three-dimensional scacaning electron microscope measurements based on the stereo-pair technique,” Precis. Eng., 29, 219–228 (2005).CrossRef
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GOST P 8.736-2011, GSI. DirectRrepeated Measurements. Methods for Processing the Measurement Results. Main Provisions.
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GOST P 8.636-2007, GSI. Microscopes with Electronic Raster. Methods of Calibration.
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V. P. Gavrilenko, D. A. Karabanov, A. Yu. Kuzin, et al., “Three-dimensional reconstruction of surface relief structures on stereo images obtained in a scanning electron microscope,” Izmer. Tekhn., No. 3, 15–18 (2015).
Metadata
Title
Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images
Authors
A. Yu. Kuzin
A. L. Vasil’ev
V. B. Mityukhlyaev
A. A. Mikhutkin
P. A. Todua
M. N. Filippov
Publication date
14-07-2016
Publisher
Springer US
Published in
Measurement Techniques / Issue 3/2016
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-016-0948-7

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