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Optical and Quantum Electronics
Published in: Optical and Quantum Electronics 5/2018

01-05-2018

Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

Authors: Y. C. Su, C. C. Chiou, V. Marinova, S. H. Lin, N. Bozhinov, B. Blagoev, T. Babeva, K. Y. Hsu, D. Z. Dimitrov

Published in: Optical and Quantum Electronics | Issue 5/2018

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Abstract

Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.
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Metadata
Title
Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications
Authors
Y. C. Su
C. C. Chiou
V. Marinova
S. H. Lin
N. Bozhinov
B. Blagoev
T. Babeva
K. Y. Hsu
D. Z. Dimitrov
Publication date
01-05-2018
Publisher
Springer US
Published in
Optical and Quantum Electronics / Issue 5/2018
Print ISSN: 0306-8919
Electronic ISSN: 1572-817X
DOI
https://doi.org/10.1007/s11082-018-1469-1

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