Skip to main content
Top

2010 | OriginalPaper | Chapter

4. Bipolar Resistive Switching in Oxides for Memory Applications

Authors : Rainer Bruchhaus, Rainer Waser

Published in: Thin Film Metal-Oxides

Publisher: Springer US

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Resistance change Random Access Memory (RRAM) devices in which at least two resistance states are used are a top candidate for future nonvolatile data storage. Simple Metal-Insulator-Metal (MIM) structures form the memory element which can be easily incorporated in large arrays. In particular, in the so-called Valence Change Memories (VCM) the drift of anions, typically oxygen, is considered as the key step to explain the bistable resistive switching behavior. A first-order classification of the observed material changes is related to the geometrical location. In “filamentary” type switching the formation and rupture of a thin filament is responsible for the resistance change. In the “distributed” systems the switching can be traced back to modifications at interfaces. Oxygen ion migration into thin tunnel oxides in high electric fields and Schottky barrier engineering with metals and complex perovskites are two mechanisms under discussion for the distributed systems. In the filamentary type of switching fast oxygen ion transport along extended defects is demonstrated to be the key step for the formation of the conducting filaments. The bistable resistance characteristics with switching induced by voltage pulses is a promising approach for future nonvolatile memory technologies. Excellent scaling behavior to sizes below 20 nm has been demonstrated.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literature
1.
go back to reference Wuttig M, Yamada Y (2007) Phase-change materials for rewriteable data storage. Nat Mater 6:824CrossRef Wuttig M, Yamada Y (2007) Phase-change materials for rewriteable data storage. Nat Mater 6:824CrossRef
2.
go back to reference Waser R (2008) Electrochemical and thermochemical memories. IEDM Tech Digest 289 Waser R (2008) Electrochemical and thermochemical memories. IEDM Tech Digest 289
3.
go back to reference Kozicki MN, Park M, Mitkova M (2005) Nanoscale memory elements based on solid-state electrolytes. IEEE Trans Nanotechnol 4:331CrossRef Kozicki MN, Park M, Mitkova M (2005) Nanoscale memory elements based on solid-state electrolytes. IEEE Trans Nanotechnol 4:331CrossRef
4.
go back to reference Kund M, Beitel G, Pinnow C-U, Roehr T, Schumann J, Symanczyk R, Ufert K-D, Mueller G (2005) Conductive bridging RAM (CBRAM): an emerging non-volatile memory technology scalable to sub 20 nm. IEDM Tech Digest 754 Kund M, Beitel G, Pinnow C-U, Roehr T, Schumann J, Symanczyk R, Ufert K-D, Mueller G (2005) Conductive bridging RAM (CBRAM): an emerging non-volatile memory technology scalable to sub 20 nm. IEDM Tech Digest 754
5.
go back to reference Waser R, Aono M (2007) Nanoionics-based resistive switching memories. Nat Mater 6:833 Waser R, Aono M (2007) Nanoionics-based resistive switching memories. Nat Mater 6:833
6.
go back to reference Hickmott TW (1962) Low-frequency negative resistance in thin anodic oxide films. J Appl Phys 33:2669CrossRef Hickmott TW (1962) Low-frequency negative resistance in thin anodic oxide films. J Appl Phys 33:2669CrossRef
7.
go back to reference Gibbons JF, Beadle WE (1964) Switching properties of thin NiO films. Solid-State Electron 7:785CrossRef Gibbons JF, Beadle WE (1964) Switching properties of thin NiO films. Solid-State Electron 7:785CrossRef
8.
go back to reference Simmons JG, Verderber RR (1967) New conduction and reversible memory phenomena in thin insulating films. Proc R Soc London Ser A 301:77CrossRef Simmons JG, Verderber RR (1967) New conduction and reversible memory phenomena in thin insulating films. Proc R Soc London Ser A 301:77CrossRef
9.
go back to reference Dearnaley G, Stoneham AM, Morgan DV (1970) Electrical phenomena in amorphous oxide films. Rep Prog Phys 33:1129CrossRef Dearnaley G, Stoneham AM, Morgan DV (1970) Electrical phenomena in amorphous oxide films. Rep Prog Phys 33:1129CrossRef
10.
go back to reference Oxley DP (1977) Electroforming, switching and memory effects in oxide thin films. Electrocomponent Sci Technol UK 3:217 Oxley DP (1977) Electroforming, switching and memory effects in oxide thin films. Electrocomponent Sci Technol UK 3:217
11.
go back to reference Pagnia H, Sotnik N (1988) Bistable switching in electroformed metal-insulator-metal devices. Phys Stat Sol 108:11CrossRef Pagnia H, Sotnik N (1988) Bistable switching in electroformed metal-insulator-metal devices. Phys Stat Sol 108:11CrossRef
12.
go back to reference Hiatt WR, Hickmott TW (1965) Bistable switching in niobium oxide diodes. Appl Phys Lett 6:106CrossRef Hiatt WR, Hickmott TW (1965) Bistable switching in niobium oxide diodes. Appl Phys Lett 6:106CrossRef
13.
go back to reference Beck A, Bednorz JG, Gerber C, Rossel C, Widmer D (2000) Reproducible switching effect in thin oxide films for memory applications. Appl Phys Lett 77:139CrossRef Beck A, Bednorz JG, Gerber C, Rossel C, Widmer D (2000) Reproducible switching effect in thin oxide films for memory applications. Appl Phys Lett 77:139CrossRef
14.
go back to reference Liu SQ, Wu NJ, Ignatiev A (2000) Electric-pulse-induced reversible resistance change effect in magnetoresistive films. Appl Phys Lett 76:2749CrossRef Liu SQ, Wu NJ, Ignatiev A (2000) Electric-pulse-induced reversible resistance change effect in magnetoresistive films. Appl Phys Lett 76:2749CrossRef
15.
go back to reference Baiatu T, Waser R, Haerdtl KH (1990) DC electrical degradation of perovskite-type titanates: III. A model of the mechanism. J Amer Ceram Soc 73:1663CrossRef Baiatu T, Waser R, Haerdtl KH (1990) DC electrical degradation of perovskite-type titanates: III. A model of the mechanism. J Amer Ceram Soc 73:1663CrossRef
16.
go back to reference Sawa A (2008) Resistive switching in transition metal oxides. Materials Today 11(6):28CrossRef Sawa A (2008) Resistive switching in transition metal oxides. Materials Today 11(6):28CrossRef
17.
go back to reference Hirose Y, Hirose H (1976) Polarity-dependent memory switching and behavior of Ag dendrite in Ag-photodoped amorphous As2S3 films. J Appl Phys 47:2767CrossRef Hirose Y, Hirose H (1976) Polarity-dependent memory switching and behavior of Ag dendrite in Ag-photodoped amorphous As2S3 films. J Appl Phys 47:2767CrossRef
18.
go back to reference Kinoshita K, Noshiro H, Yoshida C, Sato Y, Aoki M, Sugiyama Y (2008) Universal understanding of direct current transport properties of ReRAM based on a parallel resistance model. J Mater Res 23:812CrossRef Kinoshita K, Noshiro H, Yoshida C, Sato Y, Aoki M, Sugiyama Y (2008) Universal understanding of direct current transport properties of ReRAM based on a parallel resistance model. J Mater Res 23:812CrossRef
19.
go back to reference Baek IG, Lee MS, Seo S, Lee MJ, Seo DH, Suh D-S, Park JC, Park SO, Kim HS, Yoo IK, Chung U-I, Moon JT (2004) Highly scalable nonvolatile resistive memory using simple binary oxide driven by asymmetric unipolar voltage pulses. IEDM Tech Digest 587 Baek IG, Lee MS, Seo S, Lee MJ, Seo DH, Suh D-S, Park JC, Park SO, Kim HS, Yoo IK, Chung U-I, Moon JT (2004) Highly scalable nonvolatile resistive memory using simple binary oxide driven by asymmetric unipolar voltage pulses. IEDM Tech Digest 587
20.
go back to reference Meyer R, Schloss L, Brewer J, Lambertson R, Kinney W, Sanchez J, Rinerson D (2008) Oxide dual-layer memory element for scalable non-volatile cross-point memory technology. NVMTS Proc. p. 1 Meyer R, Schloss L, Brewer J, Lambertson R, Kinney W, Sanchez J, Rinerson D (2008) Oxide dual-layer memory element for scalable non-volatile cross-point memory technology. NVMTS Proc. p. 1
21.
go back to reference McPherson JW, Kim J, Shanware A, Mogul H, Rodriguez J (2003) Trends in the ultimate breakdown strength of high dielectric-constant materials. IEEE Trans Electron Dev 50(8):1771CrossRef McPherson JW, Kim J, Shanware A, Mogul H, Rodriguez J (2003) Trends in the ultimate breakdown strength of high dielectric-constant materials. IEEE Trans Electron Dev 50(8):1771CrossRef
22.
go back to reference Hasan M, Dong R, Choi HJ, Lee DS, Seong D-J, Pyun MB, Hwang H (2008) Uniform resistive switching with a thin reactive metal interface layer in metal-La0. 7Ca0. 3MnO3-metal heterostructures. Appl Phys Lett 92:202102 Hasan M, Dong R, Choi HJ, Lee DS, Seong D-J, Pyun MB, Hwang H (2008) Uniform resistive switching with a thin reactive metal interface layer in metal-La0. 7Ca0. 3MnO3-metal heterostructures. Appl Phys Lett 92:202102
23.
go back to reference Baikalov A, Wang YQ, Shen B, Lorenz B, Tsui S, Sun YY, Xue YY, Chu CW (2003) Field-driven hysteretic and reversible resistive switch at the \(\mathrm{Ag}\mbox{ \textendash }{\mathrm{Pr}}_{0.7}{\mathrm{Ca}}_{0.3}{\mathrm{MnO}}_{3}\) interface. Appl Phys Lett 83:957 Baikalov A, Wang YQ, Shen B, Lorenz B, Tsui S, Sun YY, Xue YY, Chu CW (2003) Field-driven hysteretic and reversible resistive switch at the \(\mathrm{Ag}\mbox{ \textendash }{\mathrm{Pr}}_{0.7}{\mathrm{Ca}}_{0.3}{\mathrm{MnO}}_{3}\) interface. Appl Phys Lett 83:957
24.
go back to reference Sawa A, Fujii T, Kawasaki M, Tokura Y (2004) Hysteretic current–voltage characteristics and resistance switching at a rectifying Ti∕Pr0. 7Ca0. 3MnO3 interface. Appl Phys Lett 85:4073 Sawa A, Fujii T, Kawasaki M, Tokura Y (2004) Hysteretic current–voltage characteristics and resistance switching at a rectifying Ti∕Pr0. 7Ca0. 3MnO3 interface. Appl Phys Lett 85:4073
25.
go back to reference Fujii T, Kawasaki M, Sawa A, Akoh H, Kawazoe Y, Tokura Y (2005) Hysteretic current–voltage characteristics and resistance switching at an epitaxial oxide Schottky junction SrRuO3 ∕ SrTi0. 99Nb0. 01O3. Appl Phys Lett 86:012107 Fujii T, Kawasaki M, Sawa A, Akoh H, Kawazoe Y, Tokura Y (2005) Hysteretic current–voltage characteristics and resistance switching at an epitaxial oxide Schottky junction SrRuO3 ∕ SrTi0. 99Nb0. 01O3. Appl Phys Lett 86:012107
26.
go back to reference Tomioka Y, Asamitsu A, Kuwahara H, Morimoto Y, Tokura Y (1996) Magnetic-field-induced metal-insulator phenomena in Pr1 − xCaxMnO3 with controlled charge-ordering instability. Phys Rev B 53:R1689CrossRef Tomioka Y, Asamitsu A, Kuwahara H, Morimoto Y, Tokura Y (1996) Magnetic-field-induced metal-insulator phenomena in Pr1 − xCaxMnO3 with controlled charge-ordering instability. Phys Rev B 53:R1689CrossRef
27.
go back to reference Tomioka Y, Tokura Y (2004) Global phase diagram of perovskite manganites in the plane of quenched disorder versus one-electron bandwidth. Phys Rev B 70:014432CrossRef Tomioka Y, Tokura Y (2004) Global phase diagram of perovskite manganites in the plane of quenched disorder versus one-electron bandwidth. Phys Rev B 70:014432CrossRef
28.
go back to reference Sawa A, Fujii T, Kawasaki M, Tokura Y (2006) Interface resistance switching at a few nanometer thick perovskite manganite active layers. Appl Phys Lett 88:232112CrossRef Sawa A, Fujii T, Kawasaki M, Tokura Y (2006) Interface resistance switching at a few nanometer thick perovskite manganite active layers. Appl Phys Lett 88:232112CrossRef
29.
go back to reference Fujii T, Kawasaki M, Sawa A, Kawazoe Y, Akoh H, Tokura Y (2007) Electrical properties and colossal electroresistance of heteroepitaxial \({\mathrm{SrRuO}}_{3}/{\mathrm{SrTi}}_{1-\mathrm{x}}{\mathrm{Nb}}_{\mathrm{x}}{\mathrm{O}}_{3}\ (0.0002 \leq \mathrm{x} \leq 0.02)\) Schottky junctions. Phys Rev B 75:165101 Fujii T, Kawasaki M, Sawa A, Kawazoe Y, Akoh H, Tokura Y (2007) Electrical properties and colossal electroresistance of heteroepitaxial \({\mathrm{SrRuO}}_{3}/{\mathrm{SrTi}}_{1-\mathrm{x}}{\mathrm{Nb}}_{\mathrm{x}}{\mathrm{O}}_{3}\ (0.0002 \leq \mathrm{x} \leq 0.02)\) Schottky junctions. Phys Rev B 75:165101
30.
go back to reference Nian YB, Strozier J, Wu NJ, Chen X, Ignatiev A (2007) Evidence for an oxygen diffusion model for the electric pulse induced resistance change effect in transition-metal oxides. Phys Rev Lett 98:146403CrossRef Nian YB, Strozier J, Wu NJ, Chen X, Ignatiev A (2007) Evidence for an oxygen diffusion model for the electric pulse induced resistance change effect in transition-metal oxides. Phys Rev Lett 98:146403CrossRef
31.
go back to reference Ju HL, Gopalakrishnan J, Peng JL, Qi Li, Xiong GC, Venkatesan T, Greene RL (1995) Dependence of giant magnetoresistance on oxygen stoichiometry and magnetization in polycrystalline La0. 67Ba0. 33MnOz. Phys Rev B 51:6143 Ju HL, Gopalakrishnan J, Peng JL, Qi Li, Xiong GC, Venkatesan T, Greene RL (1995) Dependence of giant magnetoresistance on oxygen stoichiometry and magnetization in polycrystalline La0. 67Ba0. 33MnOz. Phys Rev B 51:6143
32.
go back to reference Dong R, Lee DS, Xiang WF, Oh SJ, Seong DJ, Heo SH Choi HJ, Kwon MJ, Seo SN, Pyun MB, Hasan H, Hwang H (2007) Reproducible hysteresis and resistive switching in metal-CuxO-metal heterostructures. Appl Phys Lett 90:042107CrossRef Dong R, Lee DS, Xiang WF, Oh SJ, Seong DJ, Heo SH Choi HJ, Kwon MJ, Seo SN, Pyun MB, Hasan H, Hwang H (2007) Reproducible hysteresis and resistive switching in metal-CuxO-metal heterostructures. Appl Phys Lett 90:042107CrossRef
33.
go back to reference Ni MC, Guo SM, Tian HF, Zhao YG, Li JQ (2007) Resistive switching effect in SrTiO3 − δ/ Nb-doped SrTiO3 heterojunction. Appl Phys Lett 91:183502CrossRef Ni MC, Guo SM, Tian HF, Zhao YG, Li JQ (2007) Resistive switching effect in SrTiO3 − δ/ Nb-doped SrTiO3 heterojunction. Appl Phys Lett 91:183502CrossRef
34.
go back to reference Tokunaga Y, Kaneko Y, He JP, Arima T, Sawa A, Fujii T, Kawasaki M, Tokura Y (2006) Colossal electroresistance effect at metal electrode/\({\mathrm{La}}_{1-\mathrm{x}}{\mathrm{Sr}}_{1+\mathrm{x}}{\mathrm{MnO}}_{4}\) interfaces. Appl Phys Lett 88:223507CrossRef Tokunaga Y, Kaneko Y, He JP, Arima T, Sawa A, Fujii T, Kawasaki M, Tokura Y (2006) Colossal electroresistance effect at metal electrode/\({\mathrm{La}}_{1-\mathrm{x}}{\mathrm{Sr}}_{1+\mathrm{x}}{\mathrm{MnO}}_{4}\) interfaces. Appl Phys Lett 88:223507CrossRef
35.
go back to reference Odagawa A, Sato H, Inoue IH, Akoh H, Kawasaki M, Tokura Y, Kanno T, Adachi H (2004) Colossal electroresistance of a Pr0. 7Ca0. 3MnO3 thin film at room temperature. Phys Rev B 70:224403 Odagawa A, Sato H, Inoue IH, Akoh H, Kawasaki M, Tokura Y, Kanno T, Adachi H (2004) Colossal electroresistance of a Pr0. 7Ca0. 3MnO3 thin film at room temperature. Phys Rev B 70:224403
36.
go back to reference Janousch M, Meijer GI, Staub U, Delley B, Karg SF, Andreasson BP (2007) Role of oxygen vacancies in Cr-doped SrTiO3 for resistance-change memory. Adv Mat 19:2232CrossRef Janousch M, Meijer GI, Staub U, Delley B, Karg SF, Andreasson BP (2007) Role of oxygen vacancies in Cr-doped SrTiO3 for resistance-change memory. Adv Mat 19:2232CrossRef
37.
go back to reference Rozenberg MJ, Inoue IH, Sanchez MJ (2004) Nonvolatile memory with multilevel switching: a basic model. Phys Rev Lett 92:178302CrossRef Rozenberg MJ, Inoue IH, Sanchez MJ (2004) Nonvolatile memory with multilevel switching: a basic model. Phys Rev Lett 92:178302CrossRef
38.
go back to reference Frederikse HPR, Thurber WR, Hosler R (1964) Electronic transport in strontium titanate. Phys Rev 134:A442CrossRef Frederikse HPR, Thurber WR, Hosler R (1964) Electronic transport in strontium titanate. Phys Rev 134:A442CrossRef
39.
go back to reference Szot K, Speier W, Bihlmayer G, Waser R (2006) Switching the electrical resistance of individual dislocations in single-crystalline SrTiO3. Nat Mater 5:312CrossRef Szot K, Speier W, Bihlmayer G, Waser R (2006) Switching the electrical resistance of individual dislocations in single-crystalline SrTiO3. Nat Mater 5:312CrossRef
40.
go back to reference Szot K, Speier W, Carius R, Zastrow U, Beyer W (2002) Localized metallic conductivity and self-healing during thermal reduction of SrTiO3. Phys Rev Lett 88:75508CrossRef Szot K, Speier W, Carius R, Zastrow U, Beyer W (2002) Localized metallic conductivity and self-healing during thermal reduction of SrTiO3. Phys Rev Lett 88:75508CrossRef
41.
go back to reference Szot K, Speier W, Eberhardt W (1992) Microscopic nature of the metal to insulator phase transition induced through electroreduction in single-crystal KNbO3. Appl Phys Lett 60:1190CrossRef Szot K, Speier W, Eberhardt W (1992) Microscopic nature of the metal to insulator phase transition induced through electroreduction in single-crystal KNbO3. Appl Phys Lett 60:1190CrossRef
42.
go back to reference Yamada H, Miller GR (1973) Point defects in reduced strontium titanate. J Solid State Chem 6:169CrossRef Yamada H, Miller GR (1973) Point defects in reduced strontium titanate. J Solid State Chem 6:169CrossRef
43.
go back to reference Szot K, Dittmann R, Speier W, Waser R (2007) Nanoscale resistive switching in SrTiO3 thin films. Phys Stat Solidi (RRL) 1:R86 Szot K, Dittmann R, Speier W, Waser R (2007) Nanoscale resistive switching in SrTiO3 thin films. Phys Stat Solidi (RRL) 1:R86
44.
go back to reference Yang YY, Pickett MD, Li X, Ohlberg DAA, Stewart DR, Williams RS (2008) Memristive switching mechanism for metal/oxide/metal nanodevices. Nature Nanotech 3:429CrossRef Yang YY, Pickett MD, Li X, Ohlberg DAA, Stewart DR, Williams RS (2008) Memristive switching mechanism for metal/oxide/metal nanodevices. Nature Nanotech 3:429CrossRef
45.
go back to reference Inoue H, Yasuda S, Akinaga H, Tagaki H (2008) Nonpolar resistance switching of metal/ binary-transition-metal oxides/metal sandwiches: Homogeneous/inhomogeneous transition of current distribution. Phys Rev B 77:035105CrossRef Inoue H, Yasuda S, Akinaga H, Tagaki H (2008) Nonpolar resistance switching of metal/ binary-transition-metal oxides/metal sandwiches: Homogeneous/inhomogeneous transition of current distribution. Phys Rev B 77:035105CrossRef
46.
go back to reference Muenstermann R, Dittmann R, Szot K, Mi S, Jia C-L, Meuffels P, Waser R (2008) Realization of regular arrays of nanoscale resistive switching blocks in thin films of Nb-doped SrTiO3. Appl Phys Lett 93:023110CrossRef Muenstermann R, Dittmann R, Szot K, Mi S, Jia C-L, Meuffels P, Waser R (2008) Realization of regular arrays of nanoscale resistive switching blocks in thin films of Nb-doped SrTiO3. Appl Phys Lett 93:023110CrossRef
47.
go back to reference Tomio T, Miki H, Tabata H, Kawai T, Kawai S (1994) Control of electrical conductivity in laser deposited SrTiO3 thin films with Nb doping. J Appl Phys 76:5886CrossRef Tomio T, Miki H, Tabata H, Kawai T, Kawai S (1994) Control of electrical conductivity in laser deposited SrTiO3 thin films with Nb doping. J Appl Phys 76:5886CrossRef
48.
go back to reference Leitner A, Rogers CT, Prize JC, Rudman DA, Herman DR (1998) Pulsed laser deposition of superconducting Nb-doped strontium titanate thin films. Appl Phys Lett 72:3065CrossRef Leitner A, Rogers CT, Prize JC, Rudman DA, Herman DR (1998) Pulsed laser deposition of superconducting Nb-doped strontium titanate thin films. Appl Phys Lett 72:3065CrossRef
49.
go back to reference Meyer R, Waser R (2004) Resistive donor-doped SrTiO3 sensors: I, basic model for a fast sensor response. Sens Actuators B 101:335CrossRef Meyer R, Waser R (2004) Resistive donor-doped SrTiO3 sensors: I, basic model for a fast sensor response. Sens Actuators B 101:335CrossRef
50.
go back to reference Schaadt DM, Yu ET, Vaithyanathan V, Schlom DG (2004) Nanoscale current transport in epitaxial SrTiO3 on n+-Si investigated with conductive atomic force microscopy. J Vac Sci Technol B22:2030 Schaadt DM, Yu ET, Vaithyanathan V, Schlom DG (2004) Nanoscale current transport in epitaxial SrTiO3 on n+-Si investigated with conductive atomic force microscopy. J Vac Sci Technol B22:2030
51.
go back to reference Jameson JR, Fukuzumi Y, Wang Z, Griffin P, Tsunoda K, Meijer GI (2007) Field-programmable rectification in rutile TiO2 crystals. Appl Phys Lett 91:112101CrossRef Jameson JR, Fukuzumi Y, Wang Z, Griffin P, Tsunoda K, Meijer GI (2007) Field-programmable rectification in rutile TiO2 crystals. Appl Phys Lett 91:112101CrossRef
52.
go back to reference Rohde C, Choi BJ, Jeong DS, Choi S, Zhao J-S, Hwang CS (2005) Identification of a determining parameter for resistive switching of TiO2 thin films. Appl Phys Lett 86:262907CrossRef Rohde C, Choi BJ, Jeong DS, Choi S, Zhao J-S, Hwang CS (2005) Identification of a determining parameter for resistive switching of TiO2 thin films. Appl Phys Lett 86:262907CrossRef
53.
go back to reference Kim KM, Choi BJ, Shin YC, Choi S, Hwang CS (2007) Anode-interface localized filamentary mechanism in resistive switching of TiO2 thin films. Appl Phys Lett 91:012907CrossRef Kim KM, Choi BJ, Shin YC, Choi S, Hwang CS (2007) Anode-interface localized filamentary mechanism in resistive switching of TiO2 thin films. Appl Phys Lett 91:012907CrossRef
54.
go back to reference Tsunoda K, Fukuzumi Y, Jameson JR, Wang Z, Griffin PB, Nishi Y (2007) Bipolar resistive switching in polycrystalline TiO2 films. Appl Phys Lett 90:113501CrossRef Tsunoda K, Fukuzumi Y, Jameson JR, Wang Z, Griffin PB, Nishi Y (2007) Bipolar resistive switching in polycrystalline TiO2 films. Appl Phys Lett 90:113501CrossRef
55.
go back to reference Choi BJ, Jeong DS, Kim SK, Rohde C, Choi S, Oh JH, Kim HJ, Hwang CS, Szot K, Waser R, Reichenberg B, Tiedke S (2005) Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition. J Appl Phys 98:033715CrossRef Choi BJ, Jeong DS, Kim SK, Rohde C, Choi S, Oh JH, Kim HJ, Hwang CS, Szot K, Waser R, Reichenberg B, Tiedke S (2005) Resistive switching mechanism of TiO2 thin films grown by atomic-layer deposition. J Appl Phys 98:033715CrossRef
56.
go back to reference Jeong DS, Schroeder H, Waser R (2007) Coexistence of bipolar and unipolar resistive switching behaviors in a Pt/TiO2/Pt stack. Electrochem Solid-State Lett 10:G51CrossRef Jeong DS, Schroeder H, Waser R (2007) Coexistence of bipolar and unipolar resistive switching behaviors in a Pt/TiO2/Pt stack. Electrochem Solid-State Lett 10:G51CrossRef
57.
go back to reference Fujimoto M, Koyama H, Konagai M, Hosoi Y, Ishihara K, Ohnishi S, Awaya N (2006) TiO2 anatase nanolayer on tin thin film exhibiting high-speed bipolar resistive switching. Appl Phys Lett 89:223509CrossRef Fujimoto M, Koyama H, Konagai M, Hosoi Y, Ishihara K, Ohnishi S, Awaya N (2006) TiO2 anatase nanolayer on tin thin film exhibiting high-speed bipolar resistive switching. Appl Phys Lett 89:223509CrossRef
58.
go back to reference Fujimoto M, Koyama H, Hosoi Y, Ishihara K, Kobayashi S (2006) High-speed resistive switching of TiO2/TiN nano-crystalline thin film. Jpn J Appl Phys 2 11:L310 Fujimoto M, Koyama H, Hosoi Y, Ishihara K, Kobayashi S (2006) High-speed resistive switching of TiO2/TiN nano-crystalline thin film. Jpn J Appl Phys 2 11:L310
59.
go back to reference Wu SX, Xu LM, Xing XJ, Chen SM, Yuan YB, Liu YJ, Yu YP, Li XY, Li SW (2008) Reverse-bias-induced bipolar resistance switching in Pt/TiO2 ∕ SrTi0. 99Nb0. 01 O 3/Pt devices. Appl Phys Lett 93:043502 Wu SX, Xu LM, Xing XJ, Chen SM, Yuan YB, Liu YJ, Yu YP, Li XY, Li SW (2008) Reverse-bias-induced bipolar resistance switching in Pt/TiO2 ∕ SrTi0. 99Nb0. 01 O 3/Pt devices. Appl Phys Lett 93:043502
60.
go back to reference Lin C-Y, Lin C-C, Huang C-H, Lin C-H, Tseng T-Y (2007) Reproducible resistive switching behavior in sputtered CeO2 polycrystalline films. Surface Coat Tech 202:1319CrossRef Lin C-Y, Lin C-C, Huang C-H, Lin C-H, Tseng T-Y (2007) Reproducible resistive switching behavior in sputtered CeO2 polycrystalline films. Surface Coat Tech 202:1319CrossRef
61.
go back to reference Muraoka S, Osano K, Kanzawa Y, Mitani S, Fujii S, Katayama K, Katoh Y, Wie Z, Mikawa T, Arita K, Kawashima Y, Azuma R, Kawai K, Shimakawa K, Odagawa A, Takagi T (2007) Fast switching and long retention Fe-O ReRAM and its switching mechanism. IEDM Tech Dig 779 Muraoka S, Osano K, Kanzawa Y, Mitani S, Fujii S, Katayama K, Katoh Y, Wie Z, Mikawa T, Arita K, Kawashima Y, Azuma R, Kawai K, Shimakawa K, Odagawa A, Takagi T (2007) Fast switching and long retention Fe-O ReRAM and its switching mechanism. IEDM Tech Dig 779
62.
go back to reference Odagawa A, Katoh Y, Kanzawa Y, Wei Z, Mikawa T, Muraoka S, Takagi T (2007) Electroforming and resistance-switching mechanism in a magnetite thin film. Appl Phys Lett 91:133503CrossRef Odagawa A, Katoh Y, Kanzawa Y, Wei Z, Mikawa T, Muraoka S, Takagi T (2007) Electroforming and resistance-switching mechanism in a magnetite thin film. Appl Phys Lett 91:133503CrossRef
63.
go back to reference Wei Z, Kanzawa Y, Arita K, Katoh Y, Kawai K, Muraoka S, Mitani S, Fujii S, Katayama K, Iijima M, Mikawa T, Ninomiya T, Miyanaga R, Kawashima Y, Tsuji K, Himeno A, Okada T, Azuma R, Shimakawa K, Sugaya H, Takagi T, Yasuhara R, Horiba K, Kumigashira H, Oshima M (2008) Highly reliable TaOx reram and direct evidence of redox reaction mechanism. IEDM Tech Digest 293 Wei Z, Kanzawa Y, Arita K, Katoh Y, Kawai K, Muraoka S, Mitani S, Fujii S, Katayama K, Iijima M, Mikawa T, Ninomiya T, Miyanaga R, Kawashima Y, Tsuji K, Himeno A, Okada T, Azuma R, Shimakawa K, Sugaya H, Takagi T, Yasuhara R, Horiba K, Kumigashira H, Oshima M (2008) Highly reliable TaOx reram and direct evidence of redox reaction mechanism. IEDM Tech Digest 293
64.
go back to reference Chen A, Haddad S, Wu Y-C, Fang T-N, Lan Z, Avanzino S, Pangrle S, Buynoski M, Rathor M, Cai W, Tripsas N, Bill C, VanBuskirk M, Taguchi M (2005) Non-volatile resistive switching for advanced memory applications. IEDM Tech Digest 765 Chen A, Haddad S, Wu Y-C, Fang T-N, Lan Z, Avanzino S, Pangrle S, Buynoski M, Rathor M, Cai W, Tripsas N, Bill C, VanBuskirk M, Taguchi M (2005) Non-volatile resistive switching for advanced memory applications. IEDM Tech Digest 765
65.
go back to reference Chen A, Haddad S, Wu YC, Lan Z, Fang TN, Kaza S (2007) Switching characteristics of Cu2O metal-insulator-metal resistive memory. Appl Phys Lett 91:123517CrossRef Chen A, Haddad S, Wu YC, Lan Z, Fang TN, Kaza S (2007) Switching characteristics of Cu2O metal-insulator-metal resistive memory. Appl Phys Lett 91:123517CrossRef
66.
go back to reference Yang W-Y, Kim W-G, Rhee SW (2008) Radio frequency sputter deposition of single phase cuprous oxide using Cu2O as a target material and its resistive switching properties. Thin Solid Films 517:967CrossRef Yang W-Y, Kim W-G, Rhee SW (2008) Radio frequency sputter deposition of single phase cuprous oxide using Cu2O as a target material and its resistive switching properties. Thin Solid Films 517:967CrossRef
67.
go back to reference Rakhshani AE (1991) The role of space-charge-limited-current conduction in evaluation of the electrical properties of thin Cu2O films. J Appl Phys 69:2365CrossRef Rakhshani AE (1991) The role of space-charge-limited-current conduction in evaluation of the electrical properties of thin Cu2O films. J Appl Phys 69:2365CrossRef
68.
go back to reference Hasan M, Dong R, Choi HJ, Lee DS, Seong DJ, Pyun MB, Hwang H (2008) Effect of ruthenium oxide electrode on the resistive switching of Nb-doped strontium titanate. Appl Phys Lett 93:052908CrossRef Hasan M, Dong R, Choi HJ, Lee DS, Seong DJ, Pyun MB, Hwang H (2008) Effect of ruthenium oxide electrode on the resistive switching of Nb-doped strontium titanate. Appl Phys Lett 93:052908CrossRef
69.
go back to reference Schindler C, Thermadam SCP, Waser R, Kozicki MN (2007) Bipolar and unipolar resistive switching in Cu-doped SiO2. IEEE Trans Electron Dev 54:2762CrossRef Schindler C, Thermadam SCP, Waser R, Kozicki MN (2007) Bipolar and unipolar resistive switching in Cu-doped SiO2. IEEE Trans Electron Dev 54:2762CrossRef
70.
go back to reference Kozicki MN, Gopalan C, Balakrishnan M, Mitkova M (2006) A low-power nonvolatile switching element based on copper-tungsten oxide solid electrolyte. IEEE Trans Nanotechn 5:535CrossRef Kozicki MN, Gopalan C, Balakrishnan M, Mitkova M (2006) A low-power nonvolatile switching element based on copper-tungsten oxide solid electrolyte. IEEE Trans Nanotechn 5:535CrossRef
71.
go back to reference Watanabe T, Hoffmann-Eifert S, Yang L, Ruediger A, Kuegeler C, Hwang CS, Waser R (2007) Liquid injection atomic layer deposition of TiOx films using Ti[OCH(CH3)2]4. J Electrochem Soc 154:G134CrossRef Watanabe T, Hoffmann-Eifert S, Yang L, Ruediger A, Kuegeler C, Hwang CS, Waser R (2007) Liquid injection atomic layer deposition of TiOx films using Ti[OCH(CH3)2]4. J Electrochem Soc 154:G134CrossRef
72.
go back to reference Chudnovskii FA, Odynets LL, Pergament AL, Stefanovich GB (1996) Electroforming and switching in oxides of transition metals: The role of metal–insulator transition in the switching mechanism. J Solid State Chem 122:95CrossRef Chudnovskii FA, Odynets LL, Pergament AL, Stefanovich GB (1996) Electroforming and switching in oxides of transition metals: The role of metal–insulator transition in the switching mechanism. J Solid State Chem 122:95CrossRef
73.
go back to reference Waser R (ed) (2003) Nanoelectronics and information technology, 2nd edn. Wiley-VCH, Weinheim Waser R (ed) (2003) Nanoelectronics and information technology, 2nd edn. Wiley-VCH, Weinheim
74.
go back to reference Wu W, Jung GY, Olynick DL, Straznicki J, Li Z, Li X, Ohlberg DAA, Chen Y, Wang S-Y, Liddle JA, Tong WM, Williams RS (2005) One-kilobit cross-bar molecular memory circuits at 30-nm half-pitch fabricated by nanoimprint lithography. Appl Phys A 80:1173CrossRef Wu W, Jung GY, Olynick DL, Straznicki J, Li Z, Li X, Ohlberg DAA, Chen Y, Wang S-Y, Liddle JA, Tong WM, Williams RS (2005) One-kilobit cross-bar molecular memory circuits at 30-nm half-pitch fabricated by nanoimprint lithography. Appl Phys A 80:1173CrossRef
75.
go back to reference Green JE, Choi JW, Boukai A, Bunimovich Y, Johnston-Halperin E, Delonno E, Luo Y, Sheriff BA, Xu K, Shin YS, Tseng H-R, Stoddart JF, Heath JR (2007) A 160-kilobit molecular electronic memory patterned at 1011 bits per square centimeter. Nature 445:414CrossRef Green JE, Choi JW, Boukai A, Bunimovich Y, Johnston-Halperin E, Delonno E, Luo Y, Sheriff BA, Xu K, Shin YS, Tseng H-R, Stoddart JF, Heath JR (2007) A 160-kilobit molecular electronic memory patterned at 1011 bits per square centimeter. Nature 445:414CrossRef
76.
go back to reference Kinoshita K, Tamura T, Aoki M, Sugiyama Y, Tanaka H (2006) Lowering the switching current of resistance random access memory using a hetero junction structure consisting of transition metal oxides. Jpn J Appl Phys 45:L991CrossRef Kinoshita K, Tamura T, Aoki M, Sugiyama Y, Tanaka H (2006) Lowering the switching current of resistance random access memory using a hetero junction structure consisting of transition metal oxides. Jpn J Appl Phys 45:L991CrossRef
77.
go back to reference Nakagome Y, Horiguchi M, Kawahara T, Ito K (2003) Review and future prospects of low-voltage RAM circuits. IBM J Res Dev 47:525CrossRef Nakagome Y, Horiguchi M, Kawahara T, Ito K (2003) Review and future prospects of low-voltage RAM circuits. IBM J Res Dev 47:525CrossRef
78.
go back to reference Ignatiev A, Wu NJ, Chen X, Liu SQ, Papagianni C, Strozier J (2006) Resistance switching in perovskite thin films. Phys Stat Sol B 243:2089CrossRef Ignatiev A, Wu NJ, Chen X, Liu SQ, Papagianni C, Strozier J (2006) Resistance switching in perovskite thin films. Phys Stat Sol B 243:2089CrossRef
79.
go back to reference Serin N, Serin T, Horzum S, Celik Y (2005) Annealing effects on the properties of copper oxide thin films prepared by chemical deposition. Semicond Sci Technol 20:398CrossRef Serin N, Serin T, Horzum S, Celik Y (2005) Annealing effects on the properties of copper oxide thin films prepared by chemical deposition. Semicond Sci Technol 20:398CrossRef
80.
go back to reference Zhirnov VV, Cavin III,RK, Hutchby JA, Bourianoff GI (2003) Limits to binary logic switch scaling - a gedanken model. Proc IEEE USA 91:1934CrossRef Zhirnov VV, Cavin III,RK, Hutchby JA, Bourianoff GI (2003) Limits to binary logic switch scaling - a gedanken model. Proc IEEE USA 91:1934CrossRef
Metadata
Title
Bipolar Resistive Switching in Oxides for Memory Applications
Authors
Rainer Bruchhaus
Rainer Waser
Copyright Year
2010
Publisher
Springer US
DOI
https://doi.org/10.1007/978-1-4419-0664-9_4

Premium Partners