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Semiconductors
Published in: Semiconductors 5/2013

01-05-2013 | Surfaces, Interfaces, and Thin Films

Crystallization induced by thermal annealing with millisecond pulses in silicon-on-insulator films implanted with high doses of hydrogen ions

Authors: I. E. Tyschenko, V. A. Volodin, M. Voelskow, A. G. Cherkov, V. P. Popov

Published in: Semiconductors | Issue 5/2013

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Metadata
Title
Crystallization induced by thermal annealing with millisecond pulses in silicon-on-insulator films implanted with high doses of hydrogen ions
Authors
I. E. Tyschenko
V. A. Volodin
M. Voelskow
A. G. Cherkov
V. P. Popov
Publication date
01-05-2013
Publisher
SP MAIK Nauka/Interperiodica
Published in
Semiconductors / Issue 5/2013
Print ISSN: 1063-7826
Electronic ISSN: 1090-6479
DOI
https://doi.org/10.1134/S1063782613050229

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