Skip to main content
Top
Published in:
Cover of the book

2015 | OriginalPaper | Chapter

1. CVD Growth of High-Quality Single-Layer Graphene

Author : Hiroki Ago

Published in: Frontiers of Graphene and Carbon Nanotubes

Publisher: Springer Japan

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

To utilize the unique and excellent properties of graphene, synthesis of highly crystalline, large-area graphene is necessary. Among various methods to produce graphene, chemical vapor deposition (CVD) using hydrocarbon molecules in the presence of metal catalyst has shown significant progress due to the large-area availability and low cost. In this section, after a review of the growth methods of graphene with the main focus on CVD, our research on the CVD growth of high-quality graphene over heteroepitaxial metal films and domain structure analysis is presented. Recent development of the CVD growth of single-crystalline graphene as well as large-area growth based on roll-to-roll processes is also reviewed together with future prospect of graphene research.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literature
1.
2.
go back to reference Warner JH, Schaffel F, Rummeli M, Bachmatiuk A (2012) Graphene: fundamentals and emergent applications. Elsevier, Oxford Warner JH, Schaffel F, Rummeli M, Bachmatiuk A (2012) Graphene: fundamentals and emergent applications. Elsevier, Oxford
3.
go back to reference Rao CNR, Sood AK (eds) (2013) Graphene: synthesis, properties, and phenomena. Wiley, Weinheim Rao CNR, Sood AK (eds) (2013) Graphene: synthesis, properties, and phenomena. Wiley, Weinheim
4.
go back to reference Novoselov KS, Geim AK, Morozov SV, Jiang D, Zhang Y, Dubonos SV, Grigorieva IV, Firsov AA (2004) Electric field effect in atomically thin carbon films. Science 306:666CrossRef Novoselov KS, Geim AK, Morozov SV, Jiang D, Zhang Y, Dubonos SV, Grigorieva IV, Firsov AA (2004) Electric field effect in atomically thin carbon films. Science 306:666CrossRef
5.
go back to reference Berger C, Song Z, Li X, Wu X, Brown N, Naud C, Mayou D, Li T, Hass J, Marchenkov AN, Conrad EH, First PN, de Heer WA (2006) Electronic confinement and coherence in patterned epitaxial graphene. Science 312:1191CrossRef Berger C, Song Z, Li X, Wu X, Brown N, Naud C, Mayou D, Li T, Hass J, Marchenkov AN, Conrad EH, First PN, de Heer WA (2006) Electronic confinement and coherence in patterned epitaxial graphene. Science 312:1191CrossRef
6.
go back to reference Emtsev KV, Bostwick A, Horn K, Jobst J, Kellogg GL, Ley L, McChesney JL, Ohta T, Reshanov SA, Röhrl J, Rotenberg E, Schmid AK, Waldmann D, Weber HB, Seyller T (2009) Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide. Nat Mater 8:203CrossRef Emtsev KV, Bostwick A, Horn K, Jobst J, Kellogg GL, Ley L, McChesney JL, Ohta T, Reshanov SA, Röhrl J, Rotenberg E, Schmid AK, Waldmann D, Weber HB, Seyller T (2009) Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide. Nat Mater 8:203CrossRef
7.
go back to reference Gilje S, Han S, Wang M, Wang KL, Kaner RB (2007) A chemical route to graphene for device applications. Nano Lett 7:3394CrossRef Gilje S, Han S, Wang M, Wang KL, Kaner RB (2007) A chemical route to graphene for device applications. Nano Lett 7:3394CrossRef
8.
go back to reference Eda G, Fanchini G, Chhowalla M (2008) Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material. Nat Nanotechnol 3:270CrossRef Eda G, Fanchini G, Chhowalla M (2008) Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material. Nat Nanotechnol 3:270CrossRef
9.
go back to reference Yu Q, Lian J, Siriponglert S, Li H, Chen YP, Pei SS (2008) Graphene segregated on Ni surfaces and transferred to insulators. Appl Phys Lett 93:113103CrossRef Yu Q, Lian J, Siriponglert S, Li H, Chen YP, Pei SS (2008) Graphene segregated on Ni surfaces and transferred to insulators. Appl Phys Lett 93:113103CrossRef
10.
go back to reference Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9:30CrossRef Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9:30CrossRef
11.
go back to reference Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee SK, Colombo L, Ruoff RS (2009) Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324:1312CrossRef Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee SK, Colombo L, Ruoff RS (2009) Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324:1312CrossRef
12.
go back to reference Mattevi C, Kim H, Chhowalla M (2011) A review of chemical vapour deposition of graphene on copper. J Mater Chem 21:3324CrossRef Mattevi C, Kim H, Chhowalla M (2011) A review of chemical vapour deposition of graphene on copper. J Mater Chem 21:3324CrossRef
13.
go back to reference Ago H, Ogawa Y, Tsuji M, Mizuno S, Hibino H (2012) Catalytic growth of graphene: toward large-area single-crystalline graphene. J Phys Chem Lett 3:2228CrossRef Ago H, Ogawa Y, Tsuji M, Mizuno S, Hibino H (2012) Catalytic growth of graphene: toward large-area single-crystalline graphene. J Phys Chem Lett 3:2228CrossRef
14.
go back to reference Bae S, Kim H, Lee Y, Xu X, Park JS, Zheng Y, Balakrishnan J, Lei T, Kim HR, Song YI, Kim Y-J, Kim KS, Özyilmaz B, Ahn JH, Hong BH, Iijima S (2010) Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat Nanotechnol 5:574CrossRef Bae S, Kim H, Lee Y, Xu X, Park JS, Zheng Y, Balakrishnan J, Lei T, Kim HR, Song YI, Kim Y-J, Kim KS, Özyilmaz B, Ahn JH, Hong BH, Iijima S (2010) Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat Nanotechnol 5:574CrossRef
15.
go back to reference Huang PY, Vargas CSR, Zande AM, Whitney WS, Levendorf MP, Kevek JW, Garg S, Alden JS, Hustedt CJ, Zhu Y, Park J, McEuen PL, Muller DA (2011) Grains and grain boundaries in single-layer graphene atomic patchwork quilts. Nature 469:389CrossRef Huang PY, Vargas CSR, Zande AM, Whitney WS, Levendorf MP, Kevek JW, Garg S, Alden JS, Hustedt CJ, Zhu Y, Park J, McEuen PL, Muller DA (2011) Grains and grain boundaries in single-layer graphene atomic patchwork quilts. Nature 469:389CrossRef
16.
go back to reference Kim K, Artyukhov VI, Regan W, Liu Y, Crommie MF, Yakobson BI, Zettl A (2012) Ripping graphene: preferred directions. Nano Lett 12:293CrossRef Kim K, Artyukhov VI, Regan W, Liu Y, Crommie MF, Yakobson BI, Zettl A (2012) Ripping graphene: preferred directions. Nano Lett 12:293CrossRef
17.
go back to reference Sun J, Lindvall N, Cole MT, Teo KBK, Yurgens A (2011) Large-area uniform graphene-like thin films grown by chemical vapor deposition directly on silicon nitride. Appl Phys Lett 98:252107CrossRef Sun J, Lindvall N, Cole MT, Teo KBK, Yurgens A (2011) Large-area uniform graphene-like thin films grown by chemical vapor deposition directly on silicon nitride. Appl Phys Lett 98:252107CrossRef
18.
go back to reference Ago H, Ito Y, Mizuta N, Yoshida K, Hu B, Orofeo CM, Tsuji M, Ikeda K, Mizuno S (2010) Epitaxial chemical vapor deposition growth of single-layer graphene over cobalt film crystallized on sapphire. ACS Nano 4:7407CrossRef Ago H, Ito Y, Mizuta N, Yoshida K, Hu B, Orofeo CM, Tsuji M, Ikeda K, Mizuno S (2010) Epitaxial chemical vapor deposition growth of single-layer graphene over cobalt film crystallized on sapphire. ACS Nano 4:7407CrossRef
19.
go back to reference Hu B, Ago H, Ito Y, Kawahara K, Tsuji M, Magome E, Sumitani K, Mizuta N, Ikeda K, Mizuno S (2012) Epitaxial growth of large-area single-layer graphene over Cu(111)/sapphire by atmospheric pressure CVD. Carbon 50:57CrossRef Hu B, Ago H, Ito Y, Kawahara K, Tsuji M, Magome E, Sumitani K, Mizuta N, Ikeda K, Mizuno S (2012) Epitaxial growth of large-area single-layer graphene over Cu(111)/sapphire by atmospheric pressure CVD. Carbon 50:57CrossRef
20.
go back to reference Orofeo CM, Hibino H, Kawahara K, Ogawa Y, Tsuji M, Ikeda K, Mizuno S, Ago H (2012) Influence of Cu metal on the domain structure and carrier mobility in single-layer graphene. Carbon 50:2189CrossRef Orofeo CM, Hibino H, Kawahara K, Ogawa Y, Tsuji M, Ikeda K, Mizuno S, Ago H (2012) Influence of Cu metal on the domain structure and carrier mobility in single-layer graphene. Carbon 50:2189CrossRef
21.
go back to reference Ogawa Y, Hu B, Orofeo CM, Tsuji M, Ikeda K, Mizuno S, Hibino H, Ago H (2012) Domain structure and boundary in single-layer graphene grown on Cu(111) and Cu(100) films. J Phys Chem Lett 3:219CrossRef Ogawa Y, Hu B, Orofeo CM, Tsuji M, Ikeda K, Mizuno S, Hibino H, Ago H (2012) Domain structure and boundary in single-layer graphene grown on Cu(111) and Cu(100) films. J Phys Chem Lett 3:219CrossRef
22.
go back to reference Ferrari AC, Meyer JC, Scardaci V, Casiraghi C, Lazzeri M, Mauri F, Piscanec S, Jiang D, Novoselov KS, Roth S, Geim AK (2006) Raman spectrum of graphene and graphene layers. Phys Rev Lett 97:187401CrossRef Ferrari AC, Meyer JC, Scardaci V, Casiraghi C, Lazzeri M, Mauri F, Piscanec S, Jiang D, Novoselov KS, Roth S, Geim AK (2006) Raman spectrum of graphene and graphene layers. Phys Rev Lett 97:187401CrossRef
23.
go back to reference Yu Q, Jauregui LA, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D, Chung TF, Peng P, Guisinger NP, Stach EA, Bao J, Pei SS, Chen YP (2011) Control and characterization of individual grains and grain boundaries in graphene grown by chemical vapour deposition. Nat Mater 10:443CrossRef Yu Q, Jauregui LA, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D, Chung TF, Peng P, Guisinger NP, Stach EA, Bao J, Pei SS, Chen YP (2011) Control and characterization of individual grains and grain boundaries in graphene grown by chemical vapour deposition. Nat Mater 10:443CrossRef
24.
go back to reference Ago H, Kawahara K, Ogawa Y, Tanoue S, Bissett MA, Tsuji M, Sakaguchi H, Koch RJ, Fromm F, Seyller T, Komatsu K, Tsukagoshi K (2013) Epitaxial growth and electronic properties of large hexagonal graphene domains on Cu(111) thin film. Appl Phys Express 6:75101CrossRef Ago H, Kawahara K, Ogawa Y, Tanoue S, Bissett MA, Tsuji M, Sakaguchi H, Koch RJ, Fromm F, Seyller T, Komatsu K, Tsukagoshi K (2013) Epitaxial growth and electronic properties of large hexagonal graphene domains on Cu(111) thin film. Appl Phys Express 6:75101CrossRef
25.
go back to reference Ogawa Y, Komatsu K, Kawahara K, Tsuji M, Tsukagoshi K, Ago H (2014) Structure and transport properties of the interface between CVD-grown graphene domains. Nanoscale 6:7288CrossRef Ogawa Y, Komatsu K, Kawahara K, Tsuji M, Tsukagoshi K, Ago H (2014) Structure and transport properties of the interface between CVD-grown graphene domains. Nanoscale 6:7288CrossRef
26.
27.
go back to reference Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel EL, Kittrell C, Tour JM (2012) Toward the synthesis of wafer-scale single-crystal graphene on copper foils. ACS Nano 6:9110CrossRef Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel EL, Kittrell C, Tour JM (2012) Toward the synthesis of wafer-scale single-crystal graphene on copper foils. ACS Nano 6:9110CrossRef
28.
go back to reference Hao Y, Bharathi MS,Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson CW, Tutuc E, Yakobson BI, McCarty KF, Zhang YW, Kim P, Hone J, Colombo L, Ruoff RS (2013) The role of surface oxygen in the growth of large single-crystal graphene on copper. Science 342:720CrossRef Hao Y, Bharathi MS,Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson CW, Tutuc E, Yakobson BI, McCarty KF, Zhang YW, Kim P, Hone J, Colombo L, Ruoff RS (2013) The role of surface oxygen in the growth of large single-crystal graphene on copper. Science 342:720CrossRef
29.
go back to reference Yamada T, Ishihara M, Kim J, Hasegawa M, Iijima S (2012) A roll-to-roll microwave plasma chemical vapor deposition process for the production of 294mm width graphene films at low temperature. Carbon 50:2615CrossRef Yamada T, Ishihara M, Kim J, Hasegawa M, Iijima S (2012) A roll-to-roll microwave plasma chemical vapor deposition process for the production of 294mm width graphene films at low temperature. Carbon 50:2615CrossRef
30.
go back to reference Kobayashi T, Bando M, Kimura N, Shimizu K, Kadono K, Umezu N, Miyahara K, Hayazaki S, Nagai S, Mizuguchi Y, Murakami Y, Hobara D (2013) Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process. Appl Phys Lett 102:23112CrossRef Kobayashi T, Bando M, Kimura N, Shimizu K, Kadono K, Umezu N, Miyahara K, Hayazaki S, Nagai S, Mizuguchi Y, Murakami Y, Hobara D (2013) Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process. Appl Phys Lett 102:23112CrossRef
31.
go back to reference Dean CR, Young AF, Meric I, Lee C, Wang L, Sorgenfrei S, Watanabe K, Taniguchi T, Kim P, Shepard KL, Hone J (2010) Boron nitride substrates for high-quality graphene electronics. Nat Nanotechnol 5:722CrossRef Dean CR, Young AF, Meric I, Lee C, Wang L, Sorgenfrei S, Watanabe K, Taniguchi T, Kim P, Shepard KL, Hone J (2010) Boron nitride substrates for high-quality graphene electronics. Nat Nanotechnol 5:722CrossRef
32.
go back to reference Wang QH, Zadeh KK, Kis A, Coleman JN, Strano MS (2012) Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. Nat Nanotechnol 7:699CrossRef Wang QH, Zadeh KK, Kis A, Coleman JN, Strano MS (2012) Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. Nat Nanotechnol 7:699CrossRef
33.
go back to reference Ge W, Kawahara K, Tsuji M, Ago H (2013) Large-scale synthesis of NbS2 nanosheets with controlled orientation on graphene by ambient pressure CVD. Nanoscale 5:5773CrossRef Ge W, Kawahara K, Tsuji M, Ago H (2013) Large-scale synthesis of NbS2 nanosheets with controlled orientation on graphene by ambient pressure CVD. Nanoscale 5:5773CrossRef
34.
go back to reference Shi Y, Zhou W, Lu AY, Fang W, Lee YH, Hsu AL, Kim SM, Kim KK, Yang HY, Li LJ, Idrobo JC, Kong J (2012) van der Waals epitaxy of MoS2 layers using graphene as growth templates. Nano Lett 12:2784CrossRef Shi Y, Zhou W, Lu AY, Fang W, Lee YH, Hsu AL, Kim SM, Kim KK, Yang HY, Li LJ, Idrobo JC, Kong J (2012) van der Waals epitaxy of MoS2 layers using graphene as growth templates. Nano Lett 12:2784CrossRef
35.
go back to reference Yang W, Chen G, Shi Z, Liu CC, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G (2013) Epitaxial growth of single-domain graphene on hexagonal boron nitride. Nat Mater 12:792CrossRef Yang W, Chen G, Shi Z, Liu CC, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G (2013) Epitaxial growth of single-domain graphene on hexagonal boron nitride. Nat Mater 12:792CrossRef
36.
go back to reference Ago H, Endo H, Solís Fernández P, Takizawa R, Ohta Y, Fujita Y, Yamamoto K, Tsuji M (2015) Controlled van der Waals epitaxy of monolayer MoS2 triangular domains on graphene, submitted Ago H, Endo H, Solís Fernández P, Takizawa R, Ohta Y, Fujita Y, Yamamoto K, Tsuji M (2015) Controlled van der Waals epitaxy of monolayer MoS2 triangular domains on graphene, submitted
Metadata
Title
CVD Growth of High-Quality Single-Layer Graphene
Author
Hiroki Ago
Copyright Year
2015
Publisher
Springer Japan
DOI
https://doi.org/10.1007/978-4-431-55372-4_1