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Metallurgical and Materials Transactions A
Published in: Metallurgical and Materials Transactions A 8/2004

01-08-2004

Defect structures in cosputtered thin films of transition-metal disilicides with C11 b , C40 and C54 structures

Authors: Haruyuki Inui, Takashi Hashimoto, Akihiro Fujii, Hiroki Sakamoto, Norihiko L. Okamoto, Masaharu Yamaguchi, Katsushi Tanaka

Published in: Metallurgical and Materials Transactions A | Issue 8/2004

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Metadata
Title
Defect structures in cosputtered thin films of transition-metal disilicides with C11 b , C40 and C54 structures
Authors
Haruyuki Inui
Takashi Hashimoto
Akihiro Fujii
Hiroki Sakamoto
Norihiko L. Okamoto
Masaharu Yamaguchi
Katsushi Tanaka
Publication date
01-08-2004
Publisher
Springer-Verlag
Published in
Metallurgical and Materials Transactions A / Issue 8/2004
Print ISSN: 1073-5623
Electronic ISSN: 1543-1940
DOI
https://doi.org/10.1007/s11661-006-0202-z

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