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2023 | OriginalPaper | Chapter

Design and Performance Analysis of TiO_x Based MEMS Bolometer Pixel

Authors : Isha Yadav, Sudha Gupta, A. Vishwakarma, S. Dutta, Ratnamala Chatterjee

Published in: Microactuators, Microsensors and Micromechanisms

Publisher: Springer International Publishing

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Abstract

In this study the electro-thermo-mechanical behavior and analysis of TiO_x microbolometer is presented. Different thermal, electrical and coupled electromechanical simulations were performed to achieve the target Noise Equivalent Temperature Difference (NETD) and thermal time constant. The influence of various device dimensions and film thickness on device thermal conductance, NETD and thermal time constant has been reported.

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Vollmer, M., Mollmann, K.P.: Infrared Thermal Imaging, Fundamentals, Research and Applications, 2nd edn. Wiley VCH, Verlag GmbH & Co, KGaA (2018)

http://i3system.com/uncooled-detector

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Reddy, Y.A.K., Kang, I.K., Shin, Y.B., Lee, H.C.: Bolometric properties of reactively sputtered TiO₂₋_x films for thermal infrared image sensor. J. Appl. Phys. D 48, 355104 (2015)CrossRef

Shinn, Y.B., Reddy, Y.A.K., Kang, I.K., Lee, H.C.: Nb doping effect on TiO₂₋_x films for bolometer applications. J. Phys. Chem. Solids 91, 128–135 (2016)CrossRef

Yadav, I., Jain, S., Lamba, S.S., Tomar, M., Gupta, S., Gupta, V., Jain, K.K., Dutta, S., Chatterjee, R.: Growth and electrical properties of TiO_x films and its effect on microbolometer design. J. Mat. Sci.: Mater. Electron. 31, 6671–6678 (2020)

Yadav, I., et al.: Compositional, electrical and thermal properties of nonstoichiometric titanium oxide thin films for MEMS bolometer applications. Mat. Sci. Semicond. Proc. 148, 106779 (2022)CrossRef

Niklaus, F., Decharat, A., Jansson, C., Stemme, G.: Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure. Infrared Phys. Tech. 51, 168–177 (2008)CrossRef

Title: Design and Performance Analysis of TiOx Based MEMS Bolometer Pixel
Authors: Isha Yadav
Sudha Gupta
A. Vishwakarma
S. Dutta
Ratnamala Chatterjee
Publisher: Springer International Publishing
Book: Microactuators, Microsensors and Micromechanisms
Print ISBN: 978-3-031-20352-7

Electronic ISBN: 978-3-031-20353-4

Copyright Year: 2023
DOI: https://doi.org/10.1007/978-3-031-20353-4_19