Design and Simulation of a Novel Micromachined Frequency Reconfigurable Microstrip Patch Antenna

In this paper, a novel model of a frequency reconfigurable microstrip patch antenna based on MEMS (microelectromechanical system) technology is introduced. Fabrication process of the proposed antenna is comprised of bulk and surface micromachining. Patch of the antenna is deposited over a silicon platform. The platform is created by structuring the silicon membrane which is formed through bulk micromachining of a silicon chip. The patch and the platform beneath it are discretized to facilitate their vertical displacement over underside air gap. Thermal actuation is used as driving mechanism. Operational mechanism of the antenna is such that by downward relocation of the patch, its resonant frequency shifts downward. Thermal actuators are connected to the platform and applying voltage to them cause downward shift in resonant frequency of the antenna. FEM (finite element method) simulations confirm mechanical and microwave performances of the antenna which are investigated by theoretical analyses. From mechanical point of view, antenna has tolerable mechanical stability and microwave point of view indicates that return losses are good (below \(-\)10 dB) and radiation patterns are very close to each other with reasonable gains. Moreover VSWR is less than 2 throughout the frequency tuning range. In the proposed antenna by applying a CMOS compatible voltage in the range of 0–4.5 V to each thermal actuator, the resonant frequency of the antenna shifts from 17.37 GHz in up-sate position to 15.07 GHz in down-state position. As a result of this frequency shift, a frequency tuning range of 2.3 GHz with bandwidths of 3.9 % in up-state and 1.4 % in down-state positions is achieved.