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2019 | OriginalPaper | Chapter

1. Dimensional Metrology Using Mode-Locked Lasers

Authors : Seung-Woo Kim, Yoon-Soo Jang, Jiyong Park, Wooram Kim

Published in: Metrology

Publisher: Springer Singapore

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Abstract

Laser-based optical interferometry has long been playing a central role in the progress of dimensional metrology for precision manufacturing. Meanwhile, mode-locked lasers are nowadays available to facilitate the progress by responding to ever-growing industrial demands on the measurement precision and functionality beyond the capabilities of conventional lasers. The optical spectrum of mode-locked lasers, referred to as the frequency comb, acts as the ruler enabling ultra-stable wavelengths to be produced for precision interferometry with traceability to the atomic clock. In addition, mode-locked lasers are employed directly as the light source offering ultrashort pulses, of which the time-of-flight can be detected with unprecedented precision in implementing long distance measurement. Further, mode-locked lasers are able to provide well-controlled temporal coherence in combination with high spatial coherence, being suited to overcome the technical barriers long standing in 3-D profiling of rough surfaces. In summary, mode-locked lasers are now ready to lead the advance of dimensional metrology by providing unique temporal and spectral benefits over conventional continuous wave lasers or broad-spectrum light sources.

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Metadata
Title
Dimensional Metrology Using Mode-Locked Lasers
Authors
Seung-Woo Kim
Yoon-Soo Jang
Jiyong Park
Wooram Kim
Copyright Year
2019
Publisher
Springer Singapore
Book
Metrology

Print ISBN: 978-981-10-4937-8

Electronic ISBN: 978-981-10-4938-5

Copyright Year: 2019

DOI
https://doi.org/10.1007/978-981-10-4938-5_1

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