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12-03-2018

Evolutionary design optimization of MEMS: a review of its history and state-of-the-art

Authors: Pan Wang, Qibing Lu, Zhun Fan

Published in: Cluster Computing | Special Issue 4/2019

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Abstract

As an important part of the internet of things (IoTs) and cyber-physical systems (CPS), Micro-Electro-Mechanical-Systems (MEMS) is playing more and more irreplaceable role in current industrial community and the forthcoming era of the Industry 4.0. The limitations of some frequently used design methods for MEMS design optimization are analyzed in this review. In order to overcome these difficulties, a recent trend in design optimization of MEMS is inspired by the natural evolution mechanism. Many powerful techniques, especially the evolutionary computation (EC), have been used for the design optimization of MEMS. This paper presents a review of the achievements in this promising research area which utilizes EC methods for the design optimization of MEMS and also proposes three open issues that it is facing.

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Title: Evolutionary design optimization of MEMS: a review of its history and state-of-the-art
Authors: Pan Wang
Qibing Lu
Zhun Fan
Publication date: 12-03-2018
Publisher: Springer US
Published in: Cluster Computing / Issue Special Issue 4/2019
Print ISSN: 1386-7857
Electronic ISSN: 1573-7543
DOI: https://doi.org/10.1007/s10586-018-2085-3

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