Skip to main content
Top
Published in:
Cover of the book

2017 | OriginalPaper | Chapter

1. Fabrication of Micro-cutting Tools for Mechanical Micro-machining

Authors : M. Ganesh, Ajay Sidpara, Sankha Deb

Published in: Advanced Manufacturing Technologies

Publisher: Springer International Publishing

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Abstract

Micro-cutting processes are very effective manufacturing methods for complex micro-parts used in MEMS, micro-dies, micro-structured surfaces on nonconductive materials, etc. Main challenge in employing conventional machining methods for fabrication of micro-parts and features is the unavailability of the smaller tools. Popular method like grinding is failed in miniaturizing the cutting tools because of rigidity problems. This became a driving force to research the alternative processes. Different processes like electro-discharge machining, wire electro-discharge machining, laser beam machining, focused ion beam machining, etc., are evolved to accomplish the need of new fabrication methods for micro-cutting tools. Each process has showed its capabilities and limitations through various machining experiments. In this chapter, an overview of the micro-tool fabrication processes along with their characteristics is presented. New micro-end mill tool geometry and a tool fabrication method are also presented.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literature
1.
go back to reference Rahman M, Lim HS, Neo KS, Kumar AS, Wong YS, Li XP (2007) Tool-based nanofinishing and micromachining. J Mater Process Technol 185(1):2–16CrossRef Rahman M, Lim HS, Neo KS, Kumar AS, Wong YS, Li XP (2007) Tool-based nanofinishing and micromachining. J Mater Process Technol 185(1):2–16CrossRef
2.
go back to reference Rahman M, Kumar AS, Prakash JR (2001) Micro milling of pure copper. J Mater Process Technol 116(1):39–43CrossRef Rahman M, Kumar AS, Prakash JR (2001) Micro milling of pure copper. J Mater Process Technol 116(1):39–43CrossRef
3.
go back to reference Aurich JC, Engmann J, Schueler GM, Haberland R (2009) Micro grinding tool for manufacture of complex structures in brittle materials. CIRP Ann Manuf Technol 58(1):311–314CrossRef Aurich JC, Engmann J, Schueler GM, Haberland R (2009) Micro grinding tool for manufacture of complex structures in brittle materials. CIRP Ann Manuf Technol 58(1):311–314CrossRef
4.
go back to reference Asad AB, Masaki T, Rahman M, Lim HS, Wong YS (2007) Tool-based micro-machining. J Mater Process Technol 192:204–211CrossRef Asad AB, Masaki T, Rahman M, Lim HS, Wong YS (2007) Tool-based micro-machining. J Mater Process Technol 192:204–211CrossRef
5.
go back to reference Weule H, Hüntrup V, Tritschler H (2001) Micro-cutting of steel to meet new requirements in miniaturization. CIRP Ann Manuf Technol 50(1):61–64CrossRef Weule H, Hüntrup V, Tritschler H (2001) Micro-cutting of steel to meet new requirements in miniaturization. CIRP Ann Manuf Technol 50(1):61–64CrossRef
6.
go back to reference Egashira K, Mizutani K (2002) Micro-drilling of monocrystalline silicon using a cutting tool. Precis Eng 26(3):263–268CrossRef Egashira K, Mizutani K (2002) Micro-drilling of monocrystalline silicon using a cutting tool. Precis Eng 26(3):263–268CrossRef
7.
go back to reference Chae J, Park SS, Freiheit T (2006) Investigation of micro-cutting operations. Int J Mach Tools Manuf 46(3):313–332CrossRef Chae J, Park SS, Freiheit T (2006) Investigation of micro-cutting operations. Int J Mach Tools Manuf 46(3):313–332CrossRef
8.
go back to reference Ali MY (2009) Fabrication of microfluidic channel using micro end milling and micro electrical discharge milling. Int J Mech Mater Eng (IJMME) 4(1):93–97 Ali MY (2009) Fabrication of microfluidic channel using micro end milling and micro electrical discharge milling. Int J Mech Mater Eng (IJMME) 4(1):93–97
9.
go back to reference Zhan Z, He N, Li L, Shrestha R, Liu J, Wang S (2015) Precision milling of tungsten carbide with micro PCD milling tool. Int J Adv Manuf Technol 77(9–12):2095–2103CrossRef Zhan Z, He N, Li L, Shrestha R, Liu J, Wang S (2015) Precision milling of tungsten carbide with micro PCD milling tool. Int J Adv Manuf Technol 77(9–12):2095–2103CrossRef
10.
go back to reference Masuzawa T, Tönshoff HK (1997) Three-dimensional micromachining by machine tools. CIRP Ann Manuf Technol 46(2):621–628CrossRef Masuzawa T, Tönshoff HK (1997) Three-dimensional micromachining by machine tools. CIRP Ann Manuf Technol 46(2):621–628CrossRef
11.
go back to reference Huo D (2013) Micro-cutting: fundamentals and applications. Wiley, New York Huo D (2013) Micro-cutting: fundamentals and applications. Wiley, New York
12.
go back to reference Fang FZ, Liu K, Kurfess TR, Lim GC (2006) Tool-based micro machining and applications in MEMS. In: MEMS/NEMS 2006; 678–740. Springer, US Fang FZ, Liu K, Kurfess TR, Lim GC (2006) Tool-based micro machining and applications in MEMS. In: MEMS/NEMS 2006; 678–740. Springer, US
13.
go back to reference Aurich JC, Reichenbach IG, Schüler GM (2012) Manufacture and application of ultra-small micro end mills. CIRP Ann Manuf Technol 61(1):83–86CrossRef Aurich JC, Reichenbach IG, Schüler GM (2012) Manufacture and application of ultra-small micro end mills. CIRP Ann Manuf Technol 61(1):83–86CrossRef
14.
go back to reference Onikura H, Ohnishi O, Take Y, Kobayashi A (2000) Fabrication of micro carbide tools by ultrasonic vibration grinding. CIRP Ann Manuf Technol 49(1):257–260CrossRef Onikura H, Ohnishi O, Take Y, Kobayashi A (2000) Fabrication of micro carbide tools by ultrasonic vibration grinding. CIRP Ann Manuf Technol 49(1):257–260CrossRef
15.
go back to reference Lee HW, Choi HZ, Lee SW, Choi JY, Jeong HD (2002) A study on the micro tool fabrication using electrolytic in-process dressing. J Korean Soc Precis Eng 19(12):171–178 Lee HW, Choi HZ, Lee SW, Choi JY, Jeong HD (2002) A study on the micro tool fabrication using electrolytic in-process dressing. J Korean Soc Precis Eng 19(12):171–178
16.
go back to reference Ohmori H, Katahira K, Naruse T, Uehara Y, Nakao A, Mizutani M (2007) Microscopic grinding effects on fabrication of ultra-fine micro tools. CIRP Ann Manuf Technol 56(1):569–572CrossRef Ohmori H, Katahira K, Naruse T, Uehara Y, Nakao A, Mizutani M (2007) Microscopic grinding effects on fabrication of ultra-fine micro tools. CIRP Ann Manuf Technol 56(1):569–572CrossRef
17.
go back to reference Biswas I, Kumar AS, Rahman M (2010) Experimental study of wheel wear in electrolytic in-process dressing and grinding. Int J Adv Manuf Technol 50(9–12):931–940CrossRef Biswas I, Kumar AS, Rahman M (2010) Experimental study of wheel wear in electrolytic in-process dressing and grinding. Int J Adv Manuf Technol 50(9–12):931–940CrossRef
18.
go back to reference Perveen A, San WY, Rahman M (2012) Fabrication of different geometry cutting tools and their effect on the vertical micro-grinding of BK7 glass. Int J Adv Manuf Technol 61(1–4):101–115CrossRef Perveen A, San WY, Rahman M (2012) Fabrication of different geometry cutting tools and their effect on the vertical micro-grinding of BK7 glass. Int J Adv Manuf Technol 61(1–4):101–115CrossRef
19.
go back to reference Egashira K, Hosono S, Takemoto S, Masao Y (2011) Fabrication and cutting performance of cemented tungsten carbide micro-cutting tools. Precis Eng 35(4):547–553CrossRef Egashira K, Hosono S, Takemoto S, Masao Y (2011) Fabrication and cutting performance of cemented tungsten carbide micro-cutting tools. Precis Eng 35(4):547–553CrossRef
20.
go back to reference Chern GL, Wu YJ, Cheng JC, Yao JC (2007) Study on burr formation in micro-machining using micro-tools fabricated by micro-EDM. Precis Eng 31(2):122–129CrossRef Chern GL, Wu YJ, Cheng JC, Yao JC (2007) Study on burr formation in micro-machining using micro-tools fabricated by micro-EDM. Precis Eng 31(2):122–129CrossRef
21.
go back to reference Zhang Z, Peng H, Yan J (2013) Micro-cutting characteristics of EDM fabricated high-precision polycrystalline diamond tools. Int J Mach Tools Manuf 65:99–106CrossRef Zhang Z, Peng H, Yan J (2013) Micro-cutting characteristics of EDM fabricated high-precision polycrystalline diamond tools. Int J Mach Tools Manuf 65:99–106CrossRef
22.
go back to reference Zhan Z, He N, Li L, Shrestha R, Liu J, Wang S (2015) Precision milling of tungsten carbide with micro PCD milling tool. Int J Adv Manuf Technol 77(9–12):2095–2103CrossRef Zhan Z, He N, Li L, Shrestha R, Liu J, Wang S (2015) Precision milling of tungsten carbide with micro PCD milling tool. Int J Adv Manuf Technol 77(9–12):2095–2103CrossRef
23.
go back to reference Fonda P, Katahira K, Kobayashi Y, Yamazaki K (2012) WEDM condition parameter optimization for PCD microtool geometry fabrication process and quality improvement. Int J Adv Manuf Technol 63(9–12):1011–1019CrossRef Fonda P, Katahira K, Kobayashi Y, Yamazaki K (2012) WEDM condition parameter optimization for PCD microtool geometry fabrication process and quality improvement. Int J Adv Manuf Technol 63(9–12):1011–1019CrossRef
24.
go back to reference Xu K, Zou B, Wang Y, Guo P, Huang C, Wang J (2016) An experimental investigation of micro-machinability of aluminum alloy 2024 using Ti (C 7 N 3)-based cermet micro end-mill tools. J Mater Process Technol 30(235):13–27CrossRef Xu K, Zou B, Wang Y, Guo P, Huang C, Wang J (2016) An experimental investigation of micro-machinability of aluminum alloy 2024 using Ti (C 7 N 3)-based cermet micro end-mill tools. J Mater Process Technol 30(235):13–27CrossRef
25.
go back to reference Suzuki H, Okada M, Fujii K, Matsui S, Yamagata Y (2013) Development of micro milling tool made of single crystalline diamond for ceramic cutting. CIRP Ann Manuf Technol 62(1):59–62CrossRef Suzuki H, Okada M, Fujii K, Matsui S, Yamagata Y (2013) Development of micro milling tool made of single crystalline diamond for ceramic cutting. CIRP Ann Manuf Technol 62(1):59–62CrossRef
26.
go back to reference Wu W, Li W, Fang F, Xu ZW (2015) Micro tools fabrication by focused ion beam technology. In: Handbook of manufacturing engineering and technology 2015. Springer, London, pp 1473–1511 Wu W, Li W, Fang F, Xu ZW (2015) Micro tools fabrication by focused ion beam technology. In: Handbook of manufacturing engineering and technology 2015. Springer, London, pp 1473–1511
27.
go back to reference Picard YN, Adams DP, Vasile MJ, Ritchey MB (2003) Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components. Precis Eng 27(1):59–69CrossRef Picard YN, Adams DP, Vasile MJ, Ritchey MB (2003) Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components. Precis Eng 27(1):59–69CrossRef
28.
go back to reference Adams DP, Vasile MJ, Benavides G, Campbell AN (2001) Micromilling of metal alloys with focused ion beam–fabricated tools. Precis Eng 25(2):107–113CrossRef Adams DP, Vasile MJ, Benavides G, Campbell AN (2001) Micromilling of metal alloys with focused ion beam–fabricated tools. Precis Eng 25(2):107–113CrossRef
29.
go back to reference Adams DP, Vasile MJ, Mayer TM, Hodges VC (2003) Focused ion beam milling of diamond: effects of H2O on yield, surface morphology and microstructure. J Vac Sci Technol B Microelectron Nanometer Struct 21(6):2334–2343CrossRef Adams DP, Vasile MJ, Mayer TM, Hodges VC (2003) Focused ion beam milling of diamond: effects of H2O on yield, surface morphology and microstructure. J Vac Sci Technol B Microelectron Nanometer Struct 21(6):2334–2343CrossRef
30.
go back to reference Adams DP, Vasile MJ, Krishnan AS (2000) Microgrooving and microthreading tools for fabricating curvilinear features. Precis Eng 24(4):347–356CrossRef Adams DP, Vasile MJ, Krishnan AS (2000) Microgrooving and microthreading tools for fabricating curvilinear features. Precis Eng 24(4):347–356CrossRef
31.
go back to reference Ding X, Lim GC, Cheng CK, Butler DL, Shaw KC, Liu K, Fong WS (2008) Fabrication of a micro-size diamond tool using a focused ion beam. J Micromech Microeng 18(7):075017CrossRef Ding X, Lim GC, Cheng CK, Butler DL, Shaw KC, Liu K, Fong WS (2008) Fabrication of a micro-size diamond tool using a focused ion beam. J Micromech Microeng 18(7):075017CrossRef
32.
go back to reference Fang FZ, Wu H, Liu XD, Liu YC, Ng ST (2003) Tool geometry study in micromachining. J Micromech Microeng 13(5):726CrossRef Fang FZ, Wu H, Liu XD, Liu YC, Ng ST (2003) Tool geometry study in micromachining. J Micromech Microeng 13(5):726CrossRef
33.
go back to reference Nakamoto K, Katahira K, Ohmori H, Yamazaki K, Aoyama T (2012) A study on the quality of micro-machined surfaces on tungsten carbide generated by PCD micro end-milling. CIRP Ann Manuf Technol 61(1):567–570CrossRef Nakamoto K, Katahira K, Ohmori H, Yamazaki K, Aoyama T (2012) A study on the quality of micro-machined surfaces on tungsten carbide generated by PCD micro end-milling. CIRP Ann Manuf Technol 61(1):567–570CrossRef
34.
go back to reference Ohnishi O, Onikura H, Min SK, Aziz M, Tsuruoka S (2007) Characteristics of grooving by micro end mills with various tool shapes and approach to their optimal shape. Memoirs of the Faculty of Engineering, Kyushu University 67(4):143–151 Ohnishi O, Onikura H, Min SK, Aziz M, Tsuruoka S (2007) Characteristics of grooving by micro end mills with various tool shapes and approach to their optimal shape. Memoirs of the Faculty of Engineering, Kyushu University 67(4):143–151
Metadata
Title
Fabrication of Micro-cutting Tools for Mechanical Micro-machining
Authors
M. Ganesh
Ajay Sidpara
Sankha Deb
Copyright Year
2017
DOI
https://doi.org/10.1007/978-3-319-56099-1_1

Premium Partners