Top

Published in:

2014 | OriginalPaper | Chapter

4. Fabrication of Microfluidic Structures in Glass

Authors : Koji Sugioka, Ya Cheng

Published in: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications

Publisher: Springer London

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

Although laser drilling has long been used for producing straight one-dimensional (1D) holes in glass, it generally cannot be used to form 3D microchannels since thin channels become clogged with the debris produced during laser ablation. This chapter describes two approaches that have been developed to overcome this problem. The first is femtosecond-laser-assisted wet chemical etching, in which femtosecond laser irradiation is used to modify the chemical properties of glass and subsequent chemical etching is used to selectively remove the modified regions. The second approach is liquid-assisted femtosecond laser 3D drilling in which liquid is flowed through the channels to greatly enhance the removal rate of debris produced by laser ablation. This chapter also discusses several beam-shaping techniques for controlling the cross section of the microchannels. The cross-sectional shape of microchannels is significant in many microfluidic applications because it determines the fluid dynamics and biological functions of microchannels.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

previous chapter Fundamentals of Femtosecond Laser Processing

next chapter Fabrication of Fluid Control Microdevices

Manz A, Graber N, Widmer HM (1990) Miniaturized total chemical analysis systems: a novel concept for chemical sensing. Sens Actuators, B 1:244–248CrossRef

Whitesides GM (2006) The origins and the future of microfluidics. Nature 442:368–373CrossRef

McDonald JC, Whitesides GM (2002) Poly (dimethylsiloxane) as a material for fabricating microfluidic devices. Acc Chem Res 35:491–499CrossRef

Stookey SD (1950) Photosensitive gold glass and method of making it. US Pat No 2515937, 18 Jul 1950

Fuqua P, Janson SW, Hansen WW et al (1999) Fabrication of true 3D microstructures in glass/ceramic materials by pulsed UV laser volumetric exposure techniques. Proc SPIE 3618:213–220CrossRef

Hansen WW, Janson SW, Helvajian H (1997) Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass. Proc SPIE 2991:104–112CrossRef

Kondo Y, Qiu JR, Mitsuyu T et al (1999) Three-dimensional microdrilling of glass by multiphoton process and chemical etching. J Jpn Appl Phys 38:L1146–L1148CrossRef

Masuda M, Sugioka K, Cheng Y et al (2003) 3-D microstructuring inside photosensitive glass by femtosecond laser excitation. Appl Phys A 76:857–860CrossRef

Cheng Y, Sugioka K, Masuda M et al (2003) 3D microstructuring inside Foturan glass by femtosecond laser. RIKEN Rev 50:101–106

10.

Sugioka K, Cheng Y (2011) Integrated microchips for biological analysis fabricated by femtosecond laser direct writing. MRS Bull 36:1020–1027CrossRef

11.

Hongo T, Sugioka K, Niino H et al (2005) Investigation of photoreaction mechanism of photosensitive glass by femtosecond laser. J Appl Phys 97:063517(4)

12.

Cheng Y, Sugioka K, Midorikawa K et al (2005) Microfabrication of 3D hollow structures embedded in glass by femtosecond laser for Lab-on-a-chip applications. Appl Surf Sci 248:172–176CrossRef

13.

Sugioka K, Masuda M, Hongo T et al (2004) Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application. Appl Phys A 78:815–817

14.

Marcinkevičius A, Juodkazis S, Watanabe M et al (2001) Femtosecond laser-assisted three-dimensional microfabrication in silica. Opt Lett 26:277–279CrossRef

15.

Bellouard Y, Said A, Dugan M et al (2004) Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching. Opt Express 12:2120–2129CrossRef

16.

Hnatovsky C, Taylor RS, Simova E et al (2005) Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica. Opt Lett 30:1867–1869CrossRef

17.

Shimotsuma Y, Kazansky PG, Qiu J et al (2003) Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys Rev Lett 91:247405(4)

18.

Bhardwaj VR, Simova E, Rajeev PP et al (2006) Optically produced arrays of nano-planes inside fused silica. Phys Rev Lett 96:057404(4)

19.

Kiyama S, Matsuo S, Hashimoto S et al (2009) Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates. J Phys Chem C 113:11560–11566CrossRef

20.

Vishnubhatla KC, Bellini N, Ramponi R et al (2009) Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching. Opt Express 17:8685–8695CrossRef

21.

He F, Cheng Y, Xu Z et al (2010) Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser. Opt Lett 35:282–284CrossRef

22.

Li Y, Itoh K, Watanabe W et al (2001) Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses. Opt Lett 26:1912–1914CrossRef

23.

Kim TN, Campbell K, Groisman A et al (2005) Femtosecond laser-drilled capillary integrated into a microfluidic device. Appl Phys Lett 86:201106(3)

24.

An R, Li Y, Dou Y et al (2005) Simultaneous multi-microhole drilling of soda-lime glass by water-assisted ablation with femtosecond laser pulses. Opt Express 13:1855–1859CrossRef

25.

Hwang DJ, Choi TY, Grigoropoulos CP et al (2004) Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass. Appl Phys A 79:605–612CrossRef

26.

Ke K, Hasselbrink EF Jr, Hunt AJ et al (2005) Rapidly prototyped three-dimensional nanofluidic channel networks in glass substrates. Anal Chem 77:5083–5088CrossRef

27.

Liao Y, Ju Y, Zhang L et al (2010) Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing. Opt Lett 35:3225–3227CrossRef

28.

Ju Y, Liao Y, Zhang L et al (2012) Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining. Microfluid Nanofluid 11:111–117CrossRef

29.

Liao Y, Song J, Li E et al (2012) Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing. Lab Chip 12:746–749CrossRef

30.

Hanada Y, Sugioka K, Ishikawa IS et al (2011) 3D microfluidic chips with integrated functional microelements fabricated by a femtosecond laser for studying the gliding mechanism of cyanobacteria. Lab Chip 11:2109–2115CrossRef

31.

Osellame R, Taccheo S, Marangoni M et al (2003) Femtosecond writing of active optical waveguides with astigmatically shaped beams. J Opt Soc Am B 20:1559–1567CrossRef

32.

Cheng Y, Sugioka K, Midorikawa K et al (2003) Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser. Opt Lett 28:55–57CrossRef

33.

Sugioka K, Cheng Y, Midorikawa K et al (2006) Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossed-beam irradiation. Opt Lett 31:208–210CrossRef

34.

He F, Xu H, Cheng Y et al (2010) Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses. Opt Lett 35:1106–1108CrossRef

35.

Charles GD, Michael G, Block E et al (2012) Squier intuitive analysis of space-time focusing with double-ABCD calculation. Opt Express 20:14244–14259CrossRef

36.

He F, Cheng Y, Lin J et al (2011) Independent control of aspect ratios in the axial and lateral cross sections of a focal spot for three-dimensional femtosecond laser micromachining. New J Phys 13:083014 (13)

37.

Ams M, Marshall G, Spence D et al (2005) Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses. Opt Express 13:5676–5681CrossRef

38.

Sowa S, Watanabe W, Tamaki T et al (2006) Symmetric waveguides in poly (methyl methacrylate) fabricated by femtosecond laser pulses. Opt Express 14:291–297CrossRef

Title: Fabrication of Microfluidic Structures in Glass
Authors: Koji Sugioka
Ya Cheng
Publisher: Springer London
Book: Femtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications
Print ISBN: 978-1-4471-5540-9

Electronic ISBN: 978-1-4471-5541-6

Copyright Year: 2014
DOI: https://doi.org/10.1007/978-1-4471-5541-6_4