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2015 | OriginalPaper | Chapter

Finite Element Analysis of Staggered Micro Couple Resonant Sensor Structure

Authors : N. A. Shuib, A. F. Zubair, N. H. Saad, A. A. Bakir, M. F. Ismail, I. P. Almanar

Published in: InCIEC 2014

Publisher: Springer Singapore

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Abstract

Improvement in the design of staggered couple micro resonant structure based on closed loop butterfly shape spring design in fixed beam resonator has been made previously [1]. To further improve its performance in electronic applications especially in sensor design, finite element analysis (FEA) was used to determine the performance of the single resonator used including its natural frequency, mass, and frequency response in terms of the length of its sleeve, Ls, where the performance of the structure of the sensor mainly depends on the displacement of the sensor along its excitation axis. In this work, COMSOL Multiphysics software was used.

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previous chapter The Thermal Stability Property of Bio-composites: A Review
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Literature
1.
N.H. Saad, Modelling and performance evaluation of coupled micro resonator array for artificial nose. Phd. thesis, University of Birmingham (2010)
2.
3.
Z. Cui, D. Chen, S. Xia, Modelling and experiment of a silicon resonant pressure sensor. Analog Integr. Circ. Sig. Process 32, 29–35 (2002)CrossRef
4.
J.V. Crosby, M.G. Guvench, Experimentally matched finite element modeling of thermally actuated SOI MEMS micro-grippers using COMSOL multiphysics. In: Proceedings of the COMSOL Conference (2009)
5.
G. Stemme, Resonant silicon sensors. J. Micromech. Microeng. 1(2), 113–125 (1991)CrossRef
6.
V. Kaajakari, T. Mattila, A. Lipsanen, A. Oja, Nonlinear mechanical effects in silicon longitudinal mode beam resonators. Sens. Actuators A 120(1), 64–70 (2005)CrossRef
7.
N. H. Saad, et al., Performance Analysis of A Coupled Micro Resonator Array Sensor, Eurosensors XXII, Dresden, Germany 60–63 (2008)
8.
N. H. Saad et al., Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor: Microelectronic Engineering 86, 1190–1193 (2009)
Metadata
Title
Finite Element Analysis of Staggered Micro Couple Resonant Sensor Structure
Authors
N. A. Shuib
A. F. Zubair
N. H. Saad
A. A. Bakir
M. F. Ismail
I. P. Almanar
Copyright Year
2015
Publisher
Springer Singapore
Book
InCIEC 2014

Print ISBN: 978-981-287-289-0

Electronic ISBN: 978-981-287-290-6

Copyright Year: 2015

DOI
https://doi.org/10.1007/978-981-287-290-6_59