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Published in:
Acoustic Microscopy Read chapter Read first chapter

2018 | OriginalPaper | Chapter

42. High-Resolution Rutherford Backscattering Spectrometry

Author : Kaoru Nakajima

Published in: Compendium of Surface and Interface Analysis

Publisher: Springer Singapore

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Abstract

High-resolution Rutherford backscattering spectrometry (HRBS) is an advanced type of Rutherford backscattering spectrometry (RBS), depth resolution of which is improved to sub-nm.

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previous chapter High-Resolution Electron Energy Loss Spectroscopy
next chapter High-Speed Atomic Force Microscopy
Literature
1.
Kimura, K., Mannami, M.: RBS with monolayer resolution. Nucl. Instr. Meth. B 113, 270–274 (1996)CrossRef
2.
Nakajima, K., Joumori, S., Suzuki, M., Kimura, K., Osipowicz, T., Tok, K.L., Zheng, J.Z., See, A., Zhang, B.C.: Characterization of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy. Appl. Surf. Sci. 237, 416–420 (2004)CrossRef
Metadata
Title
High-Resolution Rutherford Backscattering Spectrometry
Author
Kaoru Nakajima
Copyright Year
2018
Publisher
Springer Singapore
Book
Compendium of Surface and Interface Analysis

Print ISBN: 978-981-10-6155-4

Electronic ISBN: 978-981-10-6156-1

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-981-10-6156-1_42

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