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2018 | OriginalPaper | Chapter

Integrated Thermal Flow Sensors with Programmable Power-Sensitivity Trade-Off

Authors : Massimo Piotto, Filippo Dell’Agnello, Simone Del Cesta, Paolo Bruschi

Published in: Sensors

Publisher: Springer International Publishing

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Abstract

A thermal flow sensor integrated with a programmable electronic interface into the same chip is proposed. The sensing structure is a micro-calorimeter with a double heater configuration fabricated with a simple post-processing technique applied to chip designed with a commercial CMOS process. The electronic interface is based on a low-noise, low-power instrumentation amplifier and a configurable heater current driver. The device characterization in nitrogen confirms the possibility to manage the trade-off between the sensitivity and the power delivered to the device by means of the programmable interface.

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Metadata
Title
Integrated Thermal Flow Sensors with Programmable Power-Sensitivity Trade-Off
Authors
Massimo Piotto
Filippo Dell’Agnello
Simone Del Cesta
Paolo Bruschi
Copyright Year
2018
Book
Sensors

Print ISBN: 978-3-319-55076-3

Electronic ISBN: 978-3-319-55077-0

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-3-319-55077-0_1