Integration of PDMS and PMMA for Batch Fabrication of Microfluidic Devices

Polydimethylsiloxane (PDMS) finds its use in a wide range of microfluidic applications due to its flexibility and low cost . Poly(methyl methacrylate) (PMMA) attracts growing interest in microfluidics research community due to its low cost, high transparency, good mechanical and chemical properties. Combining PMMA with PDMS allows a high degree of flexibility in designing microfluidic devices. Bonding of PMMA to PDMS is a critical step for this hybrid approach. We present here a novel technique for bonding PMMA to PDMS. This technique is simple, fast and reliable. A dry adhesive layer was laminated onto the PMMA substrate. A pre-cured PDMS mixture was spin coated onto the adhesive to form a PDMS membrane. The bonding quality and the strength of the PDMS/adhesive membrane was tested using a precision pressure source. The results show that the bond can hold a pressure up to 20 kPa.