Skip to main content
Disciplines
Automotive Business IT + Informatics Construction + Real Estate Electrical Engineering + Electronics Energy + Sustainability Insurance + Risk Finance + Banking Management + Leadership Marketing + Sales Mechanical Engineering + Materials
Events
DE
EN
Books
Journals
Topic Page
Marketing
Start single access now
Access for companies
EXTENDED SEARCH
Log in
Top
Published in:
Geschichte der Vakuumtechnik Read chapter Read first chapter

2018 | OriginalPaper | Chapter

25. Ionisationsvakuummeter

Author : Karl Jousten

Published in: Handbuch Vakuumtechnik

Publisher: Springer Fachmedien Wiesbaden

Log in

Activate our intelligent search to find suitable subject content or patents.

search-config
loading …

Zusammenfassung

In Ionisationsvakuummetern werden die neutralen Gasteilchen ionisiert und der entstehende Ionenstrom gemessen. Die Ionisierung erfolgt entweder in einem Plasma oder durch einen Elektronenstrahl. Ionisationsvakuummeter messen sehr empfindlich die Gasdichte und sind daher als Messgerät für das Ultrahochvakuum geeignet.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

inform now
previous chapter Vakuummessgeräte vom Grob- bis Hochvakuum
next chapter Partialdruckmessung
Literature
1.
2.
Buckley, O.E.: An ionization manometer. Proc. Natl. Acad. Sci. U. S. A. 2, 683 (1916)CrossRef
3.
Dushman, S., Lafferty, J.M.: Scientific foundations of vacuum technique. 2. Aufl. Wiley, New York (1962)
4.
Penning, F.M.: Ein neues Manometer für niedrige Gasdrücke, insbesondere zwischen 10−3 und 10−5 mm. Physica 4, 71 (1937) und Philips Tech. Rev. 2, 201 (1937)CrossRef
5.
Penning, F.M.: Die Glimmentladung bei niedrigem Druck zwischen koaxialen Zylindern in einem axialen Magnetfeld. Physica 3, 873 (1936) und US Patent, 1939 verliehenCrossRef
6.
Penning, F.M., Nienhuis, K.: Construction and application of a new design of the Philips vacuum gauge. Philips Tech. Rev. 11, 116 (1949)
7.
Lotz, W.: Electron-impact ionization cross-sections and ionization rate coefficients for atoms and ions. Astrophys. J. Suppl. 14, 207–238 (1967)CrossRef
8.
Tilford, C.R.: Sensitivity of hot cathode ionization gauges. J. Vac. Sci. Technol. A 3, 546–549 (1985)CrossRef
9.
Edelmann, Chr., Engelmann, P.: Möglichkeiten der Messbereichserweiterung bei Glühkatoden-Ionisationsvakuummetern. Vak. Technol. 31, 2–10 (1982)
10.
Kno, Z.H.: An approach to the non-linearity of an ionization vacuum gauge at the upper limit of the measured pressure. Vacuum 31(7), 303/08 (1981)
11.
Wang, Y.-Z.: A fundamental theory of high pressure hot cathode ionization gauges. Vacuum 34, 775–778 (1984)CrossRef
12.
Schulz, G.J., Phleps, A.V.: Ionization gauges for measuring pressures up to the millimeter range. Rev. Sci. Instrum. 28, 1051 (1957)CrossRef
13.
Bayard, R.T., Alpert, D.: Extension of the low pressure range of the ionization gauge. Rev. Sci. Instrum. 21, 571 (1950)CrossRef
14.
Arnold, P.C., Bills, D.G., Borenstein, M.D., Borichevsky, S.C.: Stable and reproducible Bayard-Alpert ionization gauge. J. Vac. Sci. Technol. A 12, 580–586 (1994)CrossRef
15.
Schmidt, K., Bergner, U.: Stabilität von Hochvakuum-Meßröhren. Vak. Forsch. Prax. 3, 177–182 (1996)CrossRef
16.
Peacock, R.N., Peacock, N.T.: Sensitivity variation of Bayard–Alpert gauges with and without closed grids from 10–4 to 1 Pa. J. Vac. Sci. Technol. A 8, 3341 (1990)CrossRef
17.
van Oostrom, A.: Vac. Symp. Trans. Comm. Vac. Technol. 1 (1961), Pergamon, New York, 443.
18.
Repa, P.: The residual current of the modulated BA-gauge. Vacuum 36, 559–560 (1986)CrossRef
19.
Chou, T.S., Tang, Z.Q.: Investigation on the low pressure limit of the Bayard-Alpert gauge. J. Vac. Sci. Technol. A 4, 2280–2283 (1986)CrossRef
20.
Filipelli, A.R.: Residual currents in several commercial ultra high Bayard-Alpert gauges. J. Vac. Sci. Technol. A 5, 3234–3241 (1987)CrossRef
21.
Berman, A.: Total pressure measurements in vacuum technology. Academic, New York (1985)
22.
Grosse, G., et al.: Secondary electrons in ion gauges. J. Vac. Sci. Technol. A 5, 3242 (1987)CrossRef
23.
Harten, U., et al.: Surface effects on the stability of hot cathode ionization gauges. Vacuum 38, 167–169 (1988)CrossRef
24.
25.
Redhead, P.A.: Modulated Bayard–Alpert gauge. Rev. Sci. Instrum. 31, 343 (1960)CrossRef
26.
Hobson, J.P.: Measurements with a modulated Bayard–Alpert gauge in aluminosilicate glass at pressures below 10−12 Torr. J. Vac. Sci. Technol. A 81, 1 (1964)
27.
Helmer, J.C., Hayward, W.D.: Ion gauge for vacuum pressure measurements below 1 × 10−10 Torr. Rev. Sci. Instrum. 37, 1652 (1966)CrossRef
28.
Han, S.-W., et al.: Performance of the bent beam ionization gauge in ultrahigh vacuum measurements. Vacuum 38, 1079–1082 (1988)CrossRef
29.
Watanabe, F.: Ion spectroscopy gauge: total pressure measurements down to 10–12 Pa with discrimination against electron-stimulated-desorption ions. J. Vac. Sci. Technol. A 10, 3333–3339 (1992)CrossRef
30.
Craig, J.H., Hock, J.H.: Construction and performance characteristics of a low cost energy prefilter. J. Vac. Sci. Technol. 17, 1360–1363 (1980)CrossRef
31.
Akimichi, H., et al.: Development of a new ionization gauge with Bessel box type energy analyser. Vacuum 46, 749–752 (1995)CrossRef
32.
33.
Lafferty, J.M.: Hot‐cathode magnetron ionization gauge for the measurement of ultrahigh vacua. J. Appl. Phys. 32, 424 (1961)CrossRef
34.
Schuemann, W.C.: Ionization vacuum gauge with photocurrent suppression. Rev. Sci. Instrum. 34, 700 (1963)CrossRef
35.
Messer, G.: Long term stability of various reference gauges over a three years period. Proc. 8th Int. Vacuum Congr. Cannes 2, 191–194 (1980)
36.
Lafferty, J.M.: Trans. Am. Vac. Soc. Vac. Symp. 7, 97 (1960)
37.
Chen, J.Z., et al.: An axial‐emission ultra‐high vacuum gauge. J. Vac. Sci. Technol. 20, 88–91 (1982)CrossRef
38.
Chen, J.Z., et al.: Proc. 9. Int. Vac. Congr., Madrid, S. 99.(1983)
39.
Ohsako, N.: A new wide‐range B–A gauge from UHV to 10−1 Torr. J. Vac. Sei. Technol. 20, 1153–1155 (1982)CrossRef
40.
Watanabe, F.: Point collector ionization gauge with spherical grid for measuring pressures below, 10–11 Pa. J. Vac. Sci. Technol. A 5, 242–248 (1987)CrossRef
41.
Gentsch, H.: Inertes Ionisationsvakuummeter mit extrahiertem Kollektor (EXKOLL). Vak. Technol. 36, 67–74 (1987)
42.
Redhead, P.A.: Ultrahigh vacuum pressure measurements: limiting processes. J. Vac. Sci. Technol. A 5, 3215–3223 (1987)CrossRef
43.
Madey, T.E.: Surface phenomena and their influence on ultrahigh vacuum gauges. J. Technol. A 5, 3249 (1987) (Summary abstract)
44.
Oshima, C., Otuko, A.: Performance of an ionization gauge with a large‐angle ion deflector. I. Total pressure measurement in extreme high vacuum. J. Vac, Sci. Technol. A 12, 3233 (1994)CrossRef
45.
Morrison, D.: Lethal voltages from ion/gas discharge interactions. Le Vide 41, 297–304 (1986)
46.
Knauer, W.: Mechanism of the Penning discharge at low pressures. J. Appl. Phys. 33, 2093 (1962)CrossRef
47.
Knauer, W., et al.: Instability of plasma sheath rotation and associated microwave generation in a Penning discharge. Appl. Phys. Lett. 3(1), 11 (1963)CrossRef
48.
Bohm, D., et al.: Theoretical considerations regarding minimum pressure for stable arc operations. Natl. Nucl. Energy Ser. 1 5, 77 ff. (1949) und 173 ff.
49.
Redhead, P.A.: The townsend discharge in a coaxial diode with axial magnetic field. Can. J. Phys. 37, 255 (1959)CrossRef
50.
Hobson, J.P., Redhead, P.A.: Operation of an inverted meagnetron gauge in the pressure range 10−3 to 10−12 mm Hg. Can. J. Phys. 36, 271 (1958)CrossRef
51.
Leck, J.H.: Sorption and desorption of gas in the cold-cathode ionization gauge. J. Sci. Instrum. 30, 271 (1953)CrossRef
52.
Barnes, G., Gaines, J., Kees, J.: Relative sensitivity and pumping rate of the redhead magnetron gauge. Vacuum 12, 141 (1962)CrossRef
53.
Rhodin, T.N., Rovner, L.H.: Gas-metal reactions in oxygen at low pressures. Trans. 7th Nat. Symp. Vac. Technol. 228 (1960)
54.
Kornelsen, E.V.: A small ionic pump employing metal evaporation. Trans. 7th Nat. Symp. Vac. Technol. 29 (1960)
55.
Li, D., Jousten, K.: Comparison of some metrological characteristics of hot and cold cathode ionization gauges. Vacuum 70, 531–541 (2003)CrossRef
56.
Li, D., Jousten, K.: Comparison of the stability of hot and cold cathode ionization gauges. J. Vac. Sci. Technol. A 21, 937–946 (2003)CrossRef
57.
Jousten, K.: Comparison of the sensitivities of ionization gauges to hydrogen and deuterium. Vacuum 46, 9–12 (1995)CrossRef
58.
Jousten, K.: Temperature corrections for the calibration of vacuum gauges. Vacuum 49, 81–87 (1998)CrossRef
Metadata
Title
Ionisationsvakuummeter
Author
Karl Jousten
Copyright Year
2018
Book
Handbuch Vakuumtechnik

Print ISBN: 978-3-658-13385-6

Electronic ISBN: 978-3-658-13386-3

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-3-658-13386-3_27

Premium Partners

    Image Credits