Advertisement
Published in:
2015 | OriginalPaper | Chapter
53. Isolating a Scanning Electron Microscope from Chiller Unit Vibrations
Authors : B. R. Barben, L. M. Hanagan
Published in: Dynamics of Civil Structures, Volume 2
Publisher: Springer International Publishing
Activate our intelligent search to find suitable subject content or patents.
Select sections of text to find matching patents with Artificial Intelligence. powered by
Select sections of text to find additional relevant content using AI-assisted search. powered by
Abstract
Although a scanning electron microscope (SEM) has very low tolerance to being disturbed by vibration, it requires a chiller for operation. Isolating the SEM from its associated chiller vibration takes careful consideration. This paper presents a case study of the performance of several slab-on-grade configurations. These configurations were specifically constructed to support various water chiller units and other service equipment as well as various vibration sensitive microscopes in a high performance research facility. In this study, the slabs are subjected to shaker-induced harmonic loading similar to that of a water chiller unit used to cool a SEM. The actual performance will be discussed in the context of generic design criteria for sensitive equipment and the SEM manufacturer-specified design criteria.