Measurement of the Spatial Characteristics of Erosion Laser Plasma of Silicon Using Compact High-Resolution Spectrometers

The spatial characteristics of erosion laser plasma are investigated. The application of compact ultraviolet-visible spectrometers for registering the plasma radiation spectra is analyzed. Erosion laser plasma is generated on the silicon target surface by pulsed laser radiation with a wavelength of 1064 nm under normal atmospheric conditions. A movable slit diaphragm oriented parallel to the target surface was used to perform scanning of the laser plasma plume. The erosion laser plasma radiation was registered using compact spectrometers. Based on the obtained plasma radiation spectra, the dependences of the silicon spectral line intensity on the geometric position of the slit diaphragm were established. A comparison of the silicon spectral line intensities on the polished and ground sides of the target was performed.