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2019 | OriginalPaper | Chapter

1. MEMS/NEMS-Enabled Energy Harvesters as Self-Powered Sensors

Authors : Kai Tao, Honglong Chang, Jin Wu, Lihua Tang, Jianmin Miao

Published in: Self-Powered and Soft Polymer MEMS/NEMS Devices

Publisher: Springer International Publishing

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Abstract

Chapter 1 reviews the recent progress in kinetic MEMS/NEMS-enabled energy harvesters as self-powered sensors. Recent advances and challenges in MEMS/NEMS-enabled self-sustained sensor working mechanisms including electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive are reviewed and discussed. Recent advances in Internet of Things (IoT) and sensor networks reveal new insight into the understanding of traditional power sources with the new characteristics of mobility, sustainability, and availability. Individually, the power consumption of each sensor unit is low; however, the number of units deployed is huge. As predicted by Cisco, trillions of sensors will be distributed on the earth by 2020. Conventional technologies which employ batteries to supply power may not be the choice. Energy harvesting systems as self-sustained power sources are capable of capturing and transforming unused ambient energy into the electrical energy. Intensive efforts during the last two decades toward the development of micro-/nanoelectromechanical systems (MEMS/NEMS)-enabled energy harvesting technologies have yield breakthroughs in self-powered sensor evolutions.

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Sauerbrey, J., Schmitt-Landsiedel, D., & Thewes, R. (2003). A 0.5-V 1-/spl mu/W successive approximation ADC. IEEE Journal of Solid-State Circuits, 38(7), 1261–1265.CrossRef

Steingart, D. (2009). Power sources for wireless sensor networks. In S. Priya & D. Inman (Eds.), Energy harvesting technologies (pp. 267–286). New York: Springer.CrossRef

Knight, C., Davidson, J., & Behrens, S. (2008). Energy options for wireless sensor nodes. Sensors, 8(12), 8037–8066.CrossRef

Paradiso, J. A., & Starner, T. (2005). Energy scavenging for mobile and wireless electronics. IEEE Pervasive Computing, 4(1), 18–27.CrossRef

Xie, J., Chengkuo, L., & Hanhua, F. (2010). Design, fabrication, and characterization of CMOS MEMS-based thermoelectric power generators. Journal of Microelectromechanical Systems, 19(2), 317–324.CrossRef

Roundy, S., Wright, P. K., & Rabaey, J. (2003). A study of low level vibrations as a power source for wireless sensor nodes. Computer Communications, 26(11), 1131–1144.CrossRef

Hudak, N. S., & Amatucci, G. G. (2008). Small-scale energy harvesting through thermoelectric, vibration, and radiofrequency power conversion. Journal of Applied Physics, 103, 101301.CrossRef

Zhou, S. X., & Zuo, L. (2018). Nonlinear dynamic analysis of asymmetric tristable energy harvesters for enhanced energy harvesting. Communications in Nonlinear Science and Numerical Simulation, 61, 271–284.MathSciNetCrossRef

Chen, G. J., Li, Y. F., Xiao, H. M., & Zhu, X. (2017). A micro-oscillation-driven energy harvester based on a flexible bipolar electret membrane with high output power. Journal of Materials Chemistry A, 5, 4150–4155.CrossRef

10.

Halim, M. A., et al. (2018). An electromagnetic rotational energy harvester using sprung eccentric rotor, driven by pseudo-walking motion. Applied Energy, 217, 66–74.CrossRef

11.

Zhang, X., et al. (2018). Broad bandwidth vibration energy harvester based on thermally stable wavy fluorinated ethylene propylene electret films with negative charges. Journal of Micromechanics and Microengineering, 28, 065012.CrossRef

12.

Wang, Z. L. (2013). Triboelectric nanogenerators as new energy technology for self-powered systems and as active mechanical and chemical sensors. ACS Nano, 7(11), 9533–9557.CrossRef

13.

Roundy, S., Wright, P. K., & Pister, K. S. (2002). Micro-electrostatic vibration-to-electricity converters. Fuel Cells (methanol), 220(22), 1–10.

14.

Sakane, Y., Suzuki, Y., & Kasagi, N. (Oct 2008). The development of a high-performance perfluorinated polymer electret and its application to micro power generation. Journal of Micromechanics and Microengineering, 18(10), 104011.CrossRef

15.

Boisseau, S., Duret, A.-B., Chaillout, J.-J., & Despesse, G. (2012). New DRIE-patterned electrets for vibration energy harvesting. In EPJ Web of Conferences (Vol. 33, p. 02010). EDP Sciences. Les Ulis, France.CrossRef

16.

Tao, K., Liu, S., Lye, S. W., Miao, J., & Hu, X. (2014). A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting. Journal of Micromechanics and Microengineering, 24(6), 065022.CrossRef

17.

Tao, K., Miao, J., Lye, S. W., & Hu, X. (2015). Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting. Sensors and Actuators A: Physical, 228, 95–103.CrossRef

18.

Tao, K., Lye, S. W., Miao, J., Tang, L., & Hu, X. (2015). Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper. Journal of Micromechanics and Microengineering, 25(10), 104014.CrossRef

19.

Tao, K., Lye, S. W., Miao, J., & Hu, X. (2015). Design and implementation of an out-of-plane electrostatic vibration energy harvester with dual-charged electret plates. Microelectronic Engineering, 135(0), 32–37.CrossRef

20.

Tao, K., Wu, J., Tang, L., Hu, L., Lye, S. W., & Miao, J. (2017). Enhanced electrostatic vibrational energy harvesting using integrated opposite-charged electrets. Journal of Micromechanics and Microengineering, 27(4), 044002.CrossRef

21.

Tao, K., Tang, L. H., Wu, J., Lye, S. W., Chang, H. L., & Miao, J. M. (2018). Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity. Journal of Microelectromechanical Systems, 27(2), 276–288.CrossRef

22.

Williams, C. B., & Yates, R. B. (Mar-Apr 1996). Analysis of a micro-electric generator for microsystems. Sensors and Actuators a-Physical, 52(1–3), 8–11.CrossRef

23.

Tao, K., Ding, G., Wang, P., Yang, Z., & Wang, Y. (2012). Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets. Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 2012, pp. 1237–1240.

24.

Tao, K., Wu, J., Kottapalli, A. G. P., et al. (2017). Micro-patterning of resin-bonded NdFeB magnet for a fully integrated electromagnetic actuator. Solid-State Electronics, 138, 66–72.CrossRef

25.

Tao, K., Wu, J., Tang, L., et al. (2016). A novel two-degree-of-freedom MEMS electromagnetic vibration energy harvester. Journal of Micromechanics and Microengineering, 26(3), 035020.CrossRef

26.

Davino, D. Kinetic energy harvesting by magnetostrictive materials. Available: http://www.sigmaaldrich.com/technical-documents/articles/materials-science/kinetic-energy-harvesting.html

27.

Ueno, T. (2015). Performance of improved magnetostrictive vibrational power generator, simple and high power output for practical applications. Journal of Applied Physics, 117, 17A740.CrossRef

28.

Lee, B., Lin, S., Wu, W., Wang, X., Chang, P., & Lee, C. (2009). Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. Journal of Micromechanics and Microengineering, 19(6), 065014.CrossRef

29.

Wang, P. H., et al. (2018). Complementary electromagnetic-triboelectric active Sensor for detecting multiple mechanical triggering. Advanced Functional Materials, 1705808, 1–9.

30.

Liu, H., Zhang, S., Kathiresan, R., Kobayashi, T., & Lee, C. (2012). Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability. Applied Physics Letters, 100(22), 223905–223903.CrossRef

31.

Xuefeng, H., Zhengguo, S., Yaoqing, C., & You, Z. (2013). A micromachined low-frequency piezoelectric harvester for vibration and wind energy scavenging. Journal of Micromechanics and Microengineering, 23(12), 125009.CrossRef

32.

Qi, Y., Kim, J., Nguyen, T. D., Lisko, B., Purohit, P. K., & McAlpine, M. C. (2011). Enhanced piezoelectricity and stretchability in energy harvesting devices fabricated from buckled PZT ribbons. Nano Letters, 11(3), 1331–1336.CrossRef

33.

Wang, Z. L., & Song, J. (2006). Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science, 312(5771), 242–246.CrossRef

34.

Xu, S., Lao, C., Weintraub, B., & Wang, Z. L. (2008). Density-controlled growth of aligned ZnO nanowire arrays by seedless chemical approach on smooth surfaces. Journal of Materials Research, 23(8), 2072–2077.CrossRef

35.

Hu, Y., Xu, C., Zhang, Y., Lin, L., Snyder, R. L., & Wang, Z. L. (2011). A nanogenerator for energy harvesting from a rotating tire and its application as a self-powered pressure/speed sensor. Advanced Materials, 23(35), 4068–4071.CrossRef

36.

Lee, M., Bae, J., Lee, J., Lee, C.-S., Hong, S., & Wang, Z. L. (2011). Self-powered environmental sensor system driven by nanogenerators. Energy & Environmental Science, 4(9), 3359–3363.CrossRef

37.

Chang, C., Tran, V. H., Wang, J., Fuh, Y.-K., & Lin, L. (2010). Direct-write piezoelectric polymeric nanogenerator with high energy conversion efficiency. Nano Letters, 10(2), 726–731.CrossRef

38.

Zhou, Y. S., et al. (2014). Nanometer resolution self-powered static and dynamic motion sensor based on micro-grated triboelectrification. Advanced Materials, 26(11), 1719–1724.CrossRef

39.

Lin, L., et al. (2013). Segmentally structured disk triboelectric nanogenerator for harvesting rotational mechanical energy. Nano Letters, 13(6), 2916–2923.CrossRef

40.

Lin, L., Wang, S., Niu, S., Liu, C., Xie, Y., & Wang, Z. L. (2014). Noncontact free-rotating disk triboelectric nanogenerator as a sustainable energy harvester and self-powered mechanical sensor. ACS Applied Materials & Interfaces, 6(4), 3031–3038.CrossRef

41.

Fan, F.-R., Lin, L., Zhu, G., Wu, W., Zhang, R., & Wang, Z. L. (2012). Transparent triboelectric nanogenerators and self-powered pressure sensors based on micropatterned plastic films. Nano Letters, 12(6), 3109–3114.CrossRef

42.

Lin, L., et al. (2013). Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging. ACS Nano, 7(9), 8266–8274.CrossRef

43.

Zhu, G., et al. (2014). Self-powered, ultrasensitive, flexible tactile sensors based on contact electrification. Nano Letters, 14(6), 3208–3213.CrossRef

44.

Yang, J., Chen, J., Liu, Y., Yang, W., Su, Y., & Wang, Z. L. (2014). Triboelectrification-based organic film nanogenerator for acoustic energy harvesting and self-powered active acoustic sensing. ACS Nano, 8(3), 2649–2657.CrossRef

45.

Yu, A., et al. (2015). Self-powered acoustic source locator in underwater environment based on organic film triboelectric nanogenerator. Nano Research, 8(3), 765–773.CrossRef

46.

Lin, Z. H., et al. (2013). A self-powered triboelectric nanosensor for mercury ion detection. Angewandte Chemie International Edition, 52(19), 5065–5069.CrossRef

47.

Li, Z., et al. (2015). β-cyclodextrin enhanced triboelectrification for self-powered phenol detection and electrochemical degradation. Energy & Environmental Science, 8(3), 887–896.CrossRef

Title: MEMS/NEMS-Enabled Energy Harvesters as Self-Powered Sensors
Authors: Kai Tao
Honglong Chang
Jin Wu
Lihua Tang
Jianmin Miao
Publisher: Springer International Publishing
Book: Self-Powered and Soft Polymer MEMS/NEMS Devices
Print ISBN: 978-3-030-05553-0

Electronic ISBN: 978-3-030-05554-7

Copyright Year: 2019
DOI: https://doi.org/10.1007/978-3-030-05554-7_1