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Published in:
2006 | OriginalPaper | Chapter
MEMS: Recent Advances and Current Challenges
Author : R. J. Pryputniewicz
Published in: Fracture of Nano and Engineering Materials and Structures
Publisher: Springer Netherlands
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Recent advances in MEMS technology have led to development of a multitude of new devices. However applications of these devices are hampered by challenges posed by their integration and packaging (
Wei et al., 2005
). Current trend in micro/nanosystems is to produce ever smaller, lighter, and more capable devices at a lower cost than ever before. In addition, the finished products have to operate at very low power and in very adverse conditions while assuring durable and reliable performance (
Pryputniewicz et al., 2001
).