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Measurement Techniques
Published in: Measurement Techniques 9/2018

05-12-2018 | PHYSICOCHEMICAL MEASUREMENTS

Microelectronic Gas Resistive Sensor Based on Nanocrystalline Tin Dioxide Films with Terbium and Antimony Additives

Authors: S. M. Kalugin, A. M. Gulyaev, D. A. Stroganov, O. B. Sarach, A. A. Tevyashov, V. A. Kotov

Published in: Measurement Techniques | Issue 9/2018

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Abstract

The technology of microelectronic resistive gas sensors is considered. Heater and thermistor contacts are formed on an oxidized silicon substrate by sputtering a nichrome film and subsequent photolithography in combination with reactive magnetron sputtering of a nanocrystalline tin dioxide film with terbium and antimony additives. A 1.5 × 1.5 mm sensor requires 90 mW for heating to optimal working temperature of 250–280°C. The sensor has very high sensitivity to alcohols and low sensitivity to benzene and acetone.
previous article Linearization of the Static Characteristics of a Radioisotope Density Meter

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Metadata
Title
Microelectronic Gas Resistive Sensor Based on Nanocrystalline Tin Dioxide Films with Terbium and Antimony Additives
Authors
S. M. Kalugin
A. M. Gulyaev
D. A. Stroganov
O. B. Sarach
A. A. Tevyashov
V. A. Kotov
Publication date
05-12-2018
Publisher
Springer US
Published in
Measurement Techniques / Issue 9/2018
Print ISSN: 0543-1972
Electronic ISSN: 1573-8906
DOI
https://doi.org/10.1007/s11018-018-1532-0

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