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Published in:
2013 | OriginalPaper | Chapter
Microfabrication Techniques
Authors : Diana C. Leitão, José Pedro Amaral, Susana Cardoso, Càndid Reig
Published in: Giant Magnetoresistance (GMR) Sensors
Publisher: Springer Berlin Heidelberg
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GMR sensors are fabricated by following a sort of techniques in a similar fashion to those related to standard CMOS processes. Deposition, patterning and encapsulation steps are found in both parts. However, characteristics related to the specific materials involved in the GMR technology recommend the use of some particular techniques. In this chapter, we focus on these specific methods, while keeping in mind the interest in merging standard CMOS with GMR technologies.