01-08-2009 | Mechanical Measurements
Minimization of the effect of temperature on thin-film nano- and microelectromechanical systems and pressure sensors based on them
Published in: Measurement Techniques | Issue 8/2009
Log inActivate our intelligent search to find suitable subject content or patents.
Select sections of text to find matching patents with Artificial Intelligence. powered by
Select sections of text to find additional relevant content using AI-assisted search. powered by