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Journal of Mechanical Science and Technology
Published in: Journal of Mechanical Science and Technology 12/2023

07-12-2023 | Original Article

Modeling of step height reduction with temperature function in copper CMP

Authors: Yeongil Shin, Jongmin Jeong, Youngwook Park, Seonho Jeong, Hokyoung Jung, Haedo Jeong

Published in: Journal of Mechanical Science and Technology | Issue 12/2023

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Metadata
Title
Modeling of step height reduction with temperature function in copper CMP
Authors
Yeongil Shin
Jongmin Jeong
Youngwook Park
Seonho Jeong
Hokyoung Jung
Haedo Jeong
Publication date
07-12-2023
Publisher
Korean Society of Mechanical Engineers
Published in
Journal of Mechanical Science and Technology / Issue 12/2023
Print ISSN: 1738-494X
Electronic ISSN: 1976-3824
DOI
https://doi.org/10.1007/s12206-023-2414-1

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