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Acoustical Physics
Published in: Acoustical Physics 3/2019

01-05-2019 | PHYSICAL ACOUSTICS

Numerical Investigation of Quasi-Lamb Modes in C‑Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor

Authors: F. Laidoudi, F. Boubenider, M. Mebarki, F. Medjili, F. Bettine

Published in: Acoustical Physics | Issue 3/2019

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Abstract

Using the finite element method, we have studied the Lamb modes characteristics propagation in c‑tilted ZnO/SiC thin film composite membrane. Phase velocity dispersion curves, electromechanical coupling factors and the mass loading effect on the fundamental quasi Lamb modes are theoretically investigated for different rotating angle (0°, θ°, 90°), θ being the angle of rotation, and for different hZnO/λ values. To develop high performance pressure micro-sensor based on thin film piezoelectric ZnO on amorphous SiC (range 0.1 to 100 Pa) the anti-symmetric fundamental qA0 mode phase shift is studied for pressure sensing.
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Metadata
Title
Numerical Investigation of Quasi-Lamb Modes in C‑Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor
Authors
F. Laidoudi
F. Boubenider
M. Mebarki
F. Medjili
F. Bettine
Publication date
01-05-2019
Publisher
Pleiades Publishing
Published in
Acoustical Physics / Issue 3/2019
Print ISSN: 1063-7710
Electronic ISSN: 1562-6865
DOI
https://doi.org/10.1134/S1063771019030059

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