Top

Optical and Quantum Electronics

Published in:

01-02-2016

Optical and electronic properties of Mo:ZnO thin films deposited using RF magnetron sputtering with different process parameters

Authors: Tao-Hsing Chen, Bo-Lun Jian

Published in: Optical and Quantum Electronics | Issue 2/2016

Activate our intelligent search to find suitable subject content or patents.

search-config

AI-assisted search

Off

Abstract

An investigation is performed into the microstructural, electronic and optical properties of Mo:ZnO (MZO) thin films deposited on glass substrates using radio frequency magnetron sputtering with various gas flow rates and deposition times. The XRD results show that all of the deposited films exhibit a strong (002) preferential orientation. The average transmittance of the MZO thin films is around 80 % in the visible light range. In addition, the resistivity and Hall mobility have values of 4.5 × 10⁻³ Ω-cm and 25 cm²/V s, respectively, given argon flow rate of 15 sccm, a deposition time of 40 min and a sputtering power of 100 W.

previous article Preparation and optical properties of sonication-assisted nitrogen doped graphene oxide sheets

next article Analysis of transition from Lorentz resonance to Fano resonance in plasmon and metamaterial systems

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 340 Zeitschriften

aus folgenden Fachgebieten:

Bauwesen + Immobilien
Business IT + Informatik
Finance + Banking
Management + Führung
Marketing + Vertrieb
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

inform now

Assuncão, V., Fortunato, E., Marques, A., Aguas, H., Ferreira, I., Costa, M.E.V., Martins, R.: Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by RF sputtering at room temperature. Thin Solid Films 427, 401–405 (2003)CrossRefADS

Ataev, B.M., Bagamadova, A.M., Mamedov, V.V., Omaev, A.K., Rabadanov, M.R.: Highly conductive and transparent thin ZnO films prepared in situ in a low pressure system. J. Cryst. Growth 198(199), 1222–1225 (1999)CrossRefADS

Fortunato, E., Assuncao, V., Goncalves, A., Marques, A., Aguas, H., Pereira, L., Ferreira, I., Vilarinho, P., Martins, R.: High quality conductive gallium-doped zinc oxide films deposited at room temperature. Thin Solid Films 451(452), 443–447 (2004)CrossRefADS

Fortunato, E., Ginley, D., Hosono, H., Paine, D.C.: Transparent conducting oxides for photovoltaics. MRS Bull. 32, 242–247 (2007)CrossRef

Gupta, A., Compaan, A.D.: All-sputtered 14 % CdS/CdTe thin-film solar cell with ZnO:Al transparent conducting oxide. Appl. Phys. Lett. 85, 684–686 (2004)CrossRefADS

Jeong, W.J., Park, G.C.: Electrical and optical properties of ZnO thin film as a function of deposition parameters. Sol. Energy Mater. Sol. Cells 65, 37–45 (2001)CrossRef

Jiang, X., Wong, F.L., Fung, M.K., Lee, S.T.: Aluminum-doped zinc oxide films as transparent conductive electrode for organic light-emitting devices. Appl. Phys. Lett. 83, 1875–1877 (2003)CrossRefADS

Kambe, M., Fukawa, M., Taneda, N., Sato, K.: Improvement of a-Si solar cell properties by using SnO₂:F TCO films coated with an ultra-thin TiO₂ layer prepared by APCVD. Sol. Energy Mater. Sol. Cells 90, 3014–3020 (2006)CrossRef

Kim, H., Horwitz, J.S., Kim, W.H., Qadri, S.B., Kafafi, Z.H.: Anode material based on Zr-doped ZnO thin films for organic light-emitting diodes. Appl. Phys. Lett. 83, 3809–3811 (2003)CrossRefADS

Li, Z.Z., Chen, Z.Z., Huang, W., Chang, S.H., Ma, X.M.: The transparence comparison of Ga-and Al-doped ZnO thin films. Appl. Surf. Sci. 257, 8486–8489 (2011)CrossRefADS

Maldonado, F., Stashans, A.: Al-doped ZnO: electronic, electrical and structural properties. J. Phys. Chem. Solids 71, 784–787 (2010)CrossRefADS

Minami, T., Yamamoto, T., Miyata, T.: Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering. Thin Solid Films 366, 63–68 (2000)CrossRefADS

Nakao, T., Nakada, T., Nakayama, Y., Miyatani, K., Kimura, Y., Saito, Y., Kaito, C.: Characterization of indium tin oxide film and practical ITO film by electron microscopy. Thin Solid Films 370, 155–162 (2000)CrossRefADS

Puetz, J., Chalvet, F.N., Aegerter, M.A.: Transparent conducting coatings on glass tubes. Proc. SPIE Int. Soc. Opt. Eng. 4804, 73–80 (2002)ADS

Rao, T.P., Santhosh Kumar, M.C.: Effect of thickness on structural, optical and electrical properties of nanostructured ZnO thin films by spray pyrolysis. Appl. Surf. Sci. 255, 4579–4584 (2009)CrossRef

Rostan, P.J., Mattheis, J., Bilger, G., Rau, U., Werner, J.H.: Formation of transparent and ohmic ZnO:Al/MoSe₂ contacts for bifacial Cu(In,Ga)Se₂ solar cells and tandem structures. Thin Solid Films 480–481, 67–70 (2005)CrossRef

Tao, K., Zhang, D.X., Wang, L.S., Zhao, J.F., Cai, H.K., Sui, Y.P., Qiao, Z.X., He, Q., Zhang, Y., Sun, Y.: Development of textured back reflector for n–i–p flexible silicon thin film solar cells. Sol. Energy Mater. Sol. Cells 94, 709–714 (2010)CrossRef

Wienke, J., van der Zanden, B., Tijssen, M., Zeman, M.: Performance of spray-deposited ZnO:In layers as front electrodes in thin-film silicon solar cells. Sol. Energy Mater. Sol. Cells 92, 884–890 (2008)CrossRef

Xiu, X., Pang, Z.Y., Lv, M., Dai, Y., Ye, L., Han, S.: Transparent conducting molybdenum-doped zinc oxide films deposited by RF magnetron sputtering. Appl. Surf. Sci. 253, 3345–3348 (2007)CrossRefADS

Title: Optical and electronic properties of Mo:ZnO thin films deposited using RF magnetron sputtering with different process parameters
Authors: Tao-Hsing Chen
Bo-Lun Jian
Publication date: 01-02-2016
Publisher: Springer US
Published in: Optical and Quantum Electronics / Issue 2/2016
Print ISSN: 0306-8919
Electronic ISSN: 1572-817X
DOI: https://doi.org/10.1007/s11082-015-0357-1

Springer Professional

Abstract

Please log in to get access to your license.

Dont have a licence yet? Then find out more about our products and how to get one now:

Springer Professional "Technik"

Springer Professional "Wirtschaft+Technik"

Springer Professional "Wirtschaft"

Other articles of this Issue 2/2016

Scattering of light into thin film solar cells by rear located hemispherical silver nanoparticles

Analysis of dark current and spectral response mechanisms for Si-based block-impurity-band detectors operating at terahertz regime

Performance analysis of polarization transformation waveguide structures for planar light circuits

Ab initio study on the structural, electronic, optical and electrical properties of Mo-, Nb- and Ta-doped rutile SnO2

Simulation of the optimized performance of thin-film silicon solar cells with nano-hole surface structures

Multichannel photonic crystal fiber surface plasmon resonance based sensor