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Experiments in Fluids

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01-04-2012 | Research Article

Optically interrogated MEMS pressure sensor array

Authors: Lukas Prochazka, Alexander H. Meier, Antonio Viggiani, Thomas Roesgen

Published in: Experiments in Fluids | Issue 4/2012

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Abstract

A novel pressure measurement technique is presented for wireless recording of time-averaged surface pressure distributions in wind tunnel surveys. An array of silicon micro-plate resonators acts as pressure sensing element. The pressure is recorded by measuring the sensor diaphragms’ resonance frequency using optical interferometry. Dependent on the quasi-static deflection caused by a pressure load, the resonance frequency varies with an average pressure sensitivity of 3 Hz/Pa in a frequency range between 30 and 150 kHz. A smart-pixel CMOS camera, narrow-band acoustic noise excitation and a specific sensor surface structure allow for the interrogation of a large number of sensors in parallel without the need for alignment between sensor and detector. Experimental tests reveal increased sensing performance with acoustic excitation of the higher vibration modes.

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Title: Optically interrogated MEMS pressure sensor array
Authors: Lukas Prochazka
Alexander H. Meier
Antonio Viggiani
Thomas Roesgen
Publication date: 01-04-2012
Publisher: Springer-Verlag
Published in: Experiments in Fluids / Issue 4/2012
Print ISSN: 0723-4864
Electronic ISSN: 1432-1114
DOI: https://doi.org/10.1007/s00348-011-1182-3

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