2011 | OriginalPaper | Chapter
Performance Studies of A Prototypical MEMS Thermal Actuator
Authors : Wei-Yang Lu, Ernest J. Garcia, Helena Jin, Bo Song
Published in: MEMS and Nanotechnology, Volume 2
Publisher: Springer New York
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This paper presents the performance of a thermal actuator made from single crystal silicon. The thermal actuator, shaped like a chevron, has four beams on each side and a shuttle in the middle. The shuttle’s motion is caused by thermal expansion and bending of the beams. The power curve, temperature profiles, in-plane and out-ofplane displacements, frequency response, as well as load-displacement curves of this device were measured at various operating voltages at the ambient condition. Experimental setup and results are described.