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Published in: Journal of Failure Analysis and Prevention 3/2017

01-06-2017

Product News

Published in: Journal of Failure Analysis and Prevention | Issue 3/2017

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Excerpt

Contour Elite 3D optical microscopes from Bruker provide the high sensitivity and stability necessary for precision 3-D surface measurements in applications and environments that are challenging for other metrology systems, such as R&D applications within the semiconductor and MEMS markets. Critical metrology includes measurements of film thickness and substrate roughness, as well as monitoring and validating key dimensional parameters such as RA roughness, pitch, width, and height. …

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Metadata
Title
Product News
Publication date
01-06-2017
Publisher
Springer US
Published in
Journal of Failure Analysis and Prevention / Issue 3/2017
Print ISSN: 1547-7029
Electronic ISSN: 1864-1245
DOI
https://doi.org/10.1007/s11668-017-0272-9

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