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2017 | OriginalPaper | Chapter

5. Radiofrequency (RF) Plasma Nitriding

Authors : Hossein Aghajani, Sahand Behrangi

Published in: Plasma Nitriding of Steels

Publisher: Springer International Publishing

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Abstract

The usual plasma nitriding is done using glow discharge with the workpiece as cathode at pressures between 100 and 1000 Pa. This procedure leads to bombardment of the surface by energetic ions, therefore the temperature is high.

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Footnotes
1
Plasma Immersion Ion Implantation.
 
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Metadata
Title
Radiofrequency (RF) Plasma Nitriding
Authors
Hossein Aghajani
Sahand Behrangi
Copyright Year
2017
DOI
https://doi.org/10.1007/978-3-319-43068-3_5

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