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2018 | OriginalPaper | Chapter

16. Related Deposition Methods

Author : Bernd Schultrich

Published in: Tetrahedrally Bonded Amorphous Carbon Films I

Publisher: Springer Berlin Heidelberg

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Abstract

The plasma arising from pulse laser excitation (for sufficient high intensities and especially with excimer lasers) resembles the plasma of vacuum arc discharges

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Metadata
Title
Related Deposition Methods
Author
Bernd Schultrich
Copyright Year
2018
Publisher
Springer Berlin Heidelberg
Book
Tetrahedrally Bonded Amorphous Carbon Films I

Print ISBN: 978-3-662-55925-3

Electronic ISBN: 978-3-662-55927-7

Copyright Year: 2018

DOI
https://doi.org/10.1007/978-3-662-55927-7_16

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