2007 | OriginalPaper | Chapter
Study of Time-Periodic Avalanche Breakdown Occurring in VLD Edge Termination Structures
Authors : U. Knipper, F. Pfirsch, T. Raker, J. Niedermeyr, G. Wachutka
Published in: Simulation of Semiconductor Processes and Devices 2007
Publisher: Springer Vienna
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IGBT device destruction often occurs localized at the edge termination. Among various termination techniques, “variation of lateral doping” (VLD) is a promising candidate to increase the ruggedness of IGBT chips. We analyzed the time-dependent behavior of VLD edge termination during avalanche breakdown by numerical simulations demonstrating the advantage of this technique. Measurements on IGBT test devices with VLD edge termination are in agreement with the simulations.