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Journal of Mechanical Science and Technology
Published in: Journal of Mechanical Science and Technology 10/2013

01-10-2013

Study on the effect of various machining speeds on the wafer polishing process

Authors: Eun Sang Lee, Sang Gyun Lee, Woong Kirl Choi, Seung Geon Choi

Published in: Journal of Mechanical Science and Technology | Issue 10/2013

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Metadata
Title
Study on the effect of various machining speeds on the wafer polishing process
Authors
Eun Sang Lee
Sang Gyun Lee
Woong Kirl Choi
Seung Geon Choi
Publication date
01-10-2013
Publisher
Springer Netherlands
Published in
Journal of Mechanical Science and Technology / Issue 10/2013
Print ISSN: 1738-494X
Electronic ISSN: 1976-3824
DOI
https://doi.org/10.1007/s12206-013-0836-x

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