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Published in:
2018 | OriginalPaper | Chapter
110. Surface Profilometer
Author : Masahiro Tosa
Published in: Compendium of Surface and Interface Analysis
Publisher: Springer Singapore
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Abstract
Surface profilometer can measure profile of surface roughness, surface texture, surface waviness, surface step height, deposited thin film thickness, and so on by means of contacting and scanning a sharp stylus with a very small measurement force less than mN.