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Journal of Electroceramics
Published in: Journal of Electroceramics 2-4/2010

01-10-2010

Triaxial MEMS accelerometer with screen printed PZT thick film

Authors: Christian C. Hindrichsen, Ninia S. Almind, Simon H. Brodersen, Rasmus Lou-Møller, Karsten Hansen, Erik V. Thomsen

Published in: Journal of Electroceramics | Issue 2-4/2010

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Abstract

Piezoelectric thick films have increasing interest due to the potential high sensitivity and actuation force for MEMS sensors and actuators. The screen printing technique is a promising deposition technique for realizing piezoelectric thick films in the thickness range from 10–100 μm. In this work integration of a screen printed piezoelectric PZT thick film with silicon MEMS technology is shown. A high bandwidth triaxial accelerometer has been designed, fabricated and characterized. The voltage sensitivity is 0.31 mV/g in the vertical direction, 0.062 mV/g in the horizontal direction and the first mode resonance frequency is 11 kHz. A Finite Element Method (FEM) model is used to validate the measured sensitivity and resonance frequency. Good agreement between the model and the measurements is seen.
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Metadata
Title
Triaxial MEMS accelerometer with screen printed PZT thick film
Authors
Christian C. Hindrichsen
Ninia S. Almind
Simon H. Brodersen
Rasmus Lou-Møller
Karsten Hansen
Erik V. Thomsen
Publication date
01-10-2010
Publisher
Springer US
Published in
Journal of Electroceramics / Issue 2-4/2010
Print ISSN: 1385-3449
Electronic ISSN: 1573-8663
DOI
https://doi.org/10.1007/s10832-010-9597-4

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