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Journal of Materials Science

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01-01-2011

UV laser ablation of parylene films from gold substrates

Authors: O. R. Musaev, P. Scott, J. M. Wrobel, J. A. Wolf, M. B. Kruger

Published in: Journal of Materials Science | Issue 1/2011

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Abstract

Parylene coatings on gold substrates were removed by laser ablation using 248-nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and X-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were determined.

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Title: UV laser ablation of parylene films from gold substrates
Authors: O. R. Musaev
P. Scott
J. M. Wrobel
J. A. Wolf
M. B. Kruger
Publication date: 01-01-2011
Publisher: Springer US
Published in: Journal of Materials Science / Issue 1/2011
Print ISSN: 0022-2461
Electronic ISSN: 1573-4803
DOI: https://doi.org/10.1007/s10853-010-4906-5

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