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Published in:
2005 | OriginalPaper | Chapter
XRD Patterns of Cathode Deposits Formed in Electric Arc Sputtering Zr-Me-Graphite Electrodes
Authors : Yu. M. Shulga, D. V. Schur, S. A. Baskakov, A. P. Simanovskiy, A. A. Rogozinskaya, A. A. Rogozinskiy, A. P. Mukhachev
Published in: Hydrogen Materials Science and Chemistry of Carbon Nanomaterials
Publisher: Springer Netherlands
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XRD X-ray diffractogram patterns have been obtained for the deposits formed in electric arc sputtering of Zr-Me-graphite electrodes, where Me is Ti, Mn, Fe, Co, Ni, Cu. The interlayer distances in the multi-wall carbon nanotubes, as the main component of the deposit, slightly depend on the presence of metal Me. It has been shown that zirconium is present in the deposit as ZrC carbide. The sputtering of Zr-Ti-graphite electrode gives rise to two carbides ZrC and Ti(Zr)C.